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{'id': 'https://openalex.org/W2149580532', 'doi': 'https://doi.org/10.1088/1742-6596/86/1/012017', 'title': '3D Etching profile evolution simulations: Time dependence analysis of the profile charging during SiO<sub>2</sub>etching in plasma', 'display_name': '3D Etching profile evolution simulations: Time dependence analysis of the profile charging during SiO<sub>2</sub>etching in plasma', 'publication_year': 2007, 'publication_date': '2007-10-01', 'ids': {'openalex': 'https://openalex.org/W2149580532', 'doi': 'https://doi.org/10.1088/1742-6596/86/1/012017', 'mag': '2149580532'}, 'language': 'en', 'primary_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.1088/1742-6596/86/1/012017', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S4210187594', 'display_name': 'Journal of Physics Conference Series', 'issn_l': '1742-6588', 'issn': ['1742-6588', '1742-6596'], 'is_oa': True, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320083', 'host_organization_name': 'IOP Publishing', 'host_organization_lineage': ['https://openalex.org/P4310311669', 'https://openalex.org/P4310320083'], 'host_organization_lineage_names': ['Institute of Physics', 'IOP Publishing'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': True, 'oa_status': 'gold', 'oa_url': 'https://doi.org/10.1088/1742-6596/86/1/012017', 'any_repository_has_fulltext': True}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5011272633', 'display_name': 'Branislav Radjenović', 'orcid': 'https://orcid.org/0000-0002-8756-1008'}, 'institutions': [{'id': 'https://openalex.org/I4387152209', 'display_name': 'Vinča Institute of Nuclear Sciences', 'ror': 'https://ror.org/04wecwh56', 'country_code': None, 'type': 'facility', 'lineage': ['https://openalex.org/I4068193', 'https://openalex.org/I4387152209']}], 'countries': [], 'is_corresponding': False, 'raw_author_name': 'Branislav Radjenović', 'raw_affiliation_strings': ['Laboratory of Physics, Vinc̆a Institute of Nuclear Sciencies, PO Box 522, 11001 Belgrade, Serbia'], 'affiliations': [{'raw_affiliation_string': 'Laboratory of Physics, Vinc̆a Institute of Nuclear Sciencies, PO Box 522, 11001 Belgrade, Serbia', 'institution_ids': ['https://openalex.org/I4387152209']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5034764967', 'display_name': 'Marija Radmilović-Radjenović', 'orcid': 'https://orcid.org/0000-0001-8931-859X'}, 'institutions': [{'id': 'https://openalex.org/I4210149559', 'display_name': 'Institute of Physics Belgrade', 'ror': 'https://ror.org/04h3h5b09', 'country_code': 'RS', 'type': 'facility', 'lineage': ['https://openalex.org/I4068193', 'https://openalex.org/I4210149559']}], 'countries': ['RS'], 'is_corresponding': False, 'raw_author_name': 'Marija Radmilović-Radjenović', 'raw_affiliation_strings': ['Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia'], 'affiliations': [{'raw_affiliation_string': 'Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia', 'institution_ids': ['https://openalex.org/I4210149559']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 2, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': None, 'apc_paid': None, 'fwci': 1.444, 'has_fulltext': True, 'fulltext_origin': 'pdf', 'cited_by_count': 8, 'citation_normalized_percentile': {'value': 0.707854, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 81, 'max': 82}, 'biblio': {'volume': '86', 'issue': None, 'first_page': '012017', 'last_page': '012017'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T10781', 'display_name': 'Plasma Diagnostics and Applications', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T10781', 'display_name': 'Plasma Diagnostics and Applications', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10472', 'display_name': 'Semiconductor materials and devices', 'score': 0.998, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10377', 'display_name': 'Metal and Thin Film Mechanics', 'score': 0.998, 'subfield': {'id': 'https://openalex.org/subfields/2211', 'display_name': 'Mechanics of Materials'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/plasma-etching', 'display_name': 'Plasma Etching', 'score': 0.70062}, {'id': 'https://openalex.org/keywords/isotropic-etching', 'display_name': 'Isotropic etching', 'score': 0.4825141}], 'concepts': [{'id': 'https://openalex.org/C100460472', 'wikidata': 'https://www.wikidata.org/wiki/Q2368605', 'display_name': 'Etching (microfabrication)', 'level': 3, 'score': 0.880338}, {'id': 'https://openalex.org/C107187091', 'wikidata': 'https://www.wikidata.org/wiki/Q2392011', 'display_name': 'Plasma etching', 'level': 4, 'score': 0.70062}, {'id': 'https://openalex.org/C97937538', 'wikidata': 'https://www.wikidata.org/wiki/Q199691', 'display_name': 'Laplace transform', 'level': 2, 'score': 0.6052963}, {'id': 'https://openalex.org/C82706917', 'wikidata': 'https://www.wikidata.org/wiki/Q10251', 'display_name': 'Plasma', 'level': 2, 'score': 0.5963101}, {'id': 'https://openalex.org/C130472188', 'wikidata': 'https://www.wikidata.org/wiki/Q1640159', 'display_name': 'Reactive-ion etching', 'level': 4, 'score': 0.5606142}, {'id': 'https://openalex.org/C19499675', 'wikidata': 'https://www.wikidata.org/wiki/Q232207', 'display_name': 'Monte Carlo method', 'level': 2, 'score': 0.5027721}, {'id': 'https://openalex.org/C33220542', 'wikidata': 'https://www.wikidata.org/wiki/Q6086567', 'display_name': 'Isotropic etching', 'level': 4, 'score': 0.4825141}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.46938607}, {'id': 'https://openalex.org/C147120987', 'wikidata': 'https://www.wikidata.org/wiki/Q2225', 'display_name': 'Electron', 'level': 2, 'score': 0.44620296}, {'id': 'https://openalex.org/C145148216', 'wikidata': 'https://www.wikidata.org/wiki/Q36496', 'display_name': 'Ion', 'level': 2, 'score': 0.44223022}, {'id': 'https://openalex.org/C30475298', 'wikidata': 'https://www.wikidata.org/wiki/Q909554', 'display_name': 'Computational physics', 'level': 1, 'score': 0.34277582}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.3271903}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.23706031}, {'id': 'https://openalex.org/C121332964', 'wikidata': 'https://www.wikidata.org/wiki/Q413', 'display_name': 'Physics', 'level': 0, 'score': 0.14296764}, {'id': 'https://openalex.org/C2779227376', 'wikidata': 'https://www.wikidata.org/wiki/Q6505497', 'display_name': 'Layer (electronics)', 'level': 2, 'score': 0.097827375}, {'id': 'https://openalex.org/C33923547', 'wikidata': 'https://www.wikidata.org/wiki/Q395', 'display_name': 'Mathematics', 'level': 0, 'score': 0.08809343}, {'id': 'https://openalex.org/C134306372', 'wikidata': 'https://www.wikidata.org/wiki/Q7754', 'display_name': 'Mathematical analysis', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C105795698', 'wikidata': 'https://www.wikidata.org/wiki/Q12483', 'display_name': 'Statistics', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C178790620', 'wikidata': 'https://www.wikidata.org/wiki/Q11351', 'display_name': 'Organic chemistry', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C62520636', 'wikidata': 'https://www.wikidata.org/wiki/Q944', 'display_name': 'Quantum mechanics', 'level': 1, 'score': 0.0}], 'mesh': [], 'locations_count': 3, 'locations': [{'is_oa': True, 'landing_page_url': 'https://doi.org/10.1088/1742-6596/86/1/012017', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S4210187594', 'display_name': 'Journal of Physics Conference Series', 'issn_l': '1742-6588', 'issn': ['1742-6588', '1742-6596'], 'is_oa': True, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320083', 'host_organization_name': 'IOP Publishing', 'host_organization_lineage': ['https://openalex.org/P4310311669', 'https://openalex.org/P4310320083'], 'host_organization_lineage_names': ['Institute of Physics', 'IOP Publishing'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, {'is_oa': True, 'landing_page_url': 'https://vinar.vin.bg.ac.rs//bitstream/id/13765/6753.pdf', 'pdf_url': 'https://vinar.vin.bg.ac.rs//bitstream/id/13765/6753.pdf', 'source': {'id': 'https://openalex.org/S4306402108', 'display_name': 'VinaR (Institute of Nuclear Sciences "Vinča")', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I4210101313', 'host_organization_name': 'University Hospital Center Dr Dragiša Mišović', 'host_organization_lineage': ['https://openalex.org/I4210101313'], 'host_organization_lineage_names': ['University Hospital Center Dr Dragiša Mišović'], 'type': 'repository'}, 'license': 'other-oa', 'license_id': 'https://openalex.org/licenses/other-oa', 'version': 'submittedVersion', 'is_accepted': False, 'is_published': False}, {'is_oa': True, 'landing_page_url': 'https://vinar.vin.bg.ac.rs/handle/123456789/6757', 'pdf_url': 'https://vinar.vin.bg.ac.rs/bitstream/123456789/6757/1/6753.pdf', 'source': {'id': 'https://openalex.org/S4306402108', 'display_name': 'VinaR (Institute of Nuclear Sciences "Vinča")', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I4210101313', 'host_organization_name': 'University Hospital Center Dr Dragiša Mišović', 'host_organization_lineage': ['https://openalex.org/I4210101313'], 'host_organization_lineage_names': ['University Hospital Center Dr Dragiša Mišović'], 'type': 'repository'}, 'license': 'other-oa', 'license_id': 'https://openalex.org/licenses/other-oa', 'version': 'submittedVersion', 'is_accepted': False, 'is_published': False}], 'best_oa_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.1088/1742-6596/86/1/012017', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S4210187594', 'display_name': 'Journal of Physics Conference Series', 'issn_l': '1742-6588', 'issn': ['1742-6588', '1742-6596'], 'is_oa': True, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320083', 'host_organization_name': 'IOP Publishing', 'host_organization_lineage': ['https://openalex.org/P4310311669', 'https://openalex.org/P4310320083'], 'host_organization_lineage_names': ['Institute of Physics', 'IOP Publishing'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'sustainable_development_goals': [], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 25, 'referenced_works': ['https://openalex.org/W1238092070', 'https://openalex.org/W1480160699', 'https://openalex.org/W1785545812', 'https://openalex.org/W1983422198', 'https://openalex.org/W2000422079', 'https://openalex.org/W2000698952', 'https://openalex.org/W2002651139', 'https://openalex.org/W2019423323', 'https://openalex.org/W2027434887', 'https://openalex.org/W2033239845', 'https://openalex.org/W2046198989', 'https://openalex.org/W2051188571', 'https://openalex.org/W2061718833', 'https://openalex.org/W2073793879', 'https://openalex.org/W2090482347', 'https://openalex.org/W2093834886', 'https://openalex.org/W2108157916', 'https://openalex.org/W2130778293', 'https://openalex.org/W2142054519', 'https://openalex.org/W2160071652', 'https://openalex.org/W2165215367', 'https://openalex.org/W2171336223', 'https://openalex.org/W2795744704', 'https://openalex.org/W2808860719', 'https://openalex.org/W3021722416'], 'related_works': ['https://openalex.org/W4388376001', 'https://openalex.org/W2765886561', 'https://openalex.org/W2093286625', 'https://openalex.org/W2089438580', 'https://openalex.org/W2082133582', 'https://openalex.org/W2051018996', 'https://openalex.org/W2035159056', 'https://openalex.org/W2023718213', 'https://openalex.org/W2009420109', 'https://openalex.org/W1332446'], 'abstract_inverted_index': {'The': [0, 85, 99, 136], 'ability': [1], 'to': [2, 8, 48], 'simulate': [3], 'feature': [4, 94, 109], 'charging': [5, 64, 142], 'was': [6], 'added': [7], 'the': [9, 28, 33, 36, 40, 49, 55, 62, 71, 75, 79, 93, 107, 124, 140], '3D': [10], 'level': [11], 'set': [12], 'profile': [13, 23, 37, 63, 141], 'evolution': [14, 24], 'simulator': [15], 'described': [16], 'earlier.': [17], 'A': [18], 'comprehensive': [19], 'simulation': [20], 'of': [21, 27, 35, 61, 74, 81, 126, 129, 134, 139], 'etching': [22, 29, 41, 133, 145], 'requires': [25], 'knowledge': [26], 'rates': [30], 'at': [31], 'all': [32], 'points': [34], 'surface': [38, 100], 'during': [39, 143], 'process.': [42], 'Electrons': [43], 'do': [44], 'not': [45], 'contribute': [46], 'directly': [47], 'material': [50, 83], 'removal,': [51], 'but': [52], 'they': [53], 'are': [54], 'source,': [56], 'together': [57], 'with': [58], 'positive': [59], 'ions,': [60], 'that': [65], 'has': [66], 'many': [67], 'negative': [68], 'consequences': [69], 'on': [70], 'final': [72], 'outcome': [73], 'process': [76], 'especially': [77], 'in': [78, 123, 146], 'case': [80, 125], 'insulating': [82], 'etching.': [84], 'ion': [86], 'and': [87, 103], 'electron': [88], 'fluxes': [89], 'were': [90, 110, 121], 'computed': [91], 'along': [92], 'using': [95, 116], 'Monte': [96], 'Carlo': [97], 'method.': [98, 119], 'potential': [101], 'profiles': [102], 'electric': [104], 'field': [105], 'for': [106], 'entire': [108], 'generated': [111], 'by': [112], 'solving': [113], 'Laplace': [114], 'equation': [115], 'finite': [117], 'elements': [118], 'Calculations': [120], 'performed': [122], 'simplified': [127], 'model': [128], 'Ar+/CF4': [130], 'non-equilibrium': [131], 'plasma': [132, 147], 'SiO2.': [135], 'time': [137], 'dependence': [138], 'SiO2': [144], 'is': [148], 'presented.': [149]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2149580532', 'counts_by_year': [{'year': 2018, 'cited_by_count': 1}, {'year': 2013, 'cited_by_count': 2}], 'updated_date': '2024-12-15T11:01:24.587643', 'created_date': '2016-06-24'}