Publication Information

{'id': 'https://openalex.org/W4386033027', 'doi': 'https://doi.org/10.3390/solids4030014', 'title': 'Wet Chemical and Plasma Etching of Photosensitive Glass', 'display_name': 'Wet Chemical and Plasma Etching of Photosensitive Glass', 'publication_year': 2023, 'publication_date': '2023-08-21', 'ids': {'openalex': 'https://openalex.org/W4386033027', 'doi': 'https://doi.org/10.3390/solids4030014'}, 'language': 'en', 'primary_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.3390/solids4030014', 'pdf_url': 'https://www.mdpi.com/2673-6497/4/3/14/pdf?version=1692611510', 'source': {'id': 'https://openalex.org/S4210235027', 'display_name': 'Solids', 'issn_l': '2673-6497', 'issn': ['2673-6497'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310310987', 'host_organization_name': 'Multidisciplinary Digital Publishing Institute', 'host_organization_lineage': ['https://openalex.org/P4310310987'], 'host_organization_lineage_names': ['Multidisciplinary Digital Publishing Institute'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': True, 'oa_status': 'gold', 'oa_url': 'https://www.mdpi.com/2673-6497/4/3/14/pdf?version=1692611510', 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5058603763', 'display_name': 'Ulrike Brokmann', 'orcid': 'https://orcid.org/0000-0002-9203-4237'}, 'institutions': [{'id': 'https://openalex.org/I119449181', 'display_name': 'Technische Universität Ilmenau', 'ror': 'https://ror.org/01weqhp73', 'country_code': 'DE', 'type': 'education', 'lineage': ['https://openalex.org/I119449181']}], 'countries': ['DE'], 'is_corresponding': True, 'raw_author_name': 'Ulrike Brokmann', 'raw_affiliation_strings': ['Group of Inorganic–Nonmetallic Materials, Institute of Materials Engineering, Technische Universität Ilmenau, D-98684 Ilmenau, Germany'], 'affiliations': [{'raw_affiliation_string': 'Group of Inorganic–Nonmetallic Materials, Institute of Materials Engineering, Technische Universität Ilmenau, D-98684 Ilmenau, Germany', 'institution_ids': ['https://openalex.org/I119449181']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5081721576', 'display_name': 'C. Weigel', 'orcid': 'https://orcid.org/0000-0003-2167-1041'}, 'institutions': [{'id': 'https://openalex.org/I119449181', 'display_name': 'Technische Universität Ilmenau', 'ror': 'https://ror.org/01weqhp73', 'country_code': 'DE', 'type': 'education', 'lineage': ['https://openalex.org/I119449181']}], 'countries': ['DE'], 'is_corresponding': False, 'raw_author_name': 'Christoph Weigel', 'raw_affiliation_strings': ['Microsystems Technology Group, Institute of Micro- and Nanotechnologies, Technische Universität Ilmenau, D-98684 Ilmenau, Germany'], 'affiliations': [{'raw_affiliation_string': 'Microsystems Technology Group, Institute of Micro- and Nanotechnologies, Technische Universität Ilmenau, D-98684 Ilmenau, Germany', 'institution_ids': ['https://openalex.org/I119449181']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5092669226', 'display_name': 'Luisa-Marie Altendorf', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I119449181', 'display_name': 'Technische Universität Ilmenau', 'ror': 'https://ror.org/01weqhp73', 'country_code': 'DE', 'type': 'education', 'lineage': ['https://openalex.org/I119449181']}], 'countries': ['DE'], 'is_corresponding': False, 'raw_author_name': 'Luisa-Marie Altendorf', 'raw_affiliation_strings': ['Group of Inorganic–Nonmetallic Materials, Institute of Materials Engineering, Technische Universität Ilmenau, D-98684 Ilmenau, Germany'], 'affiliations': [{'raw_affiliation_string': 'Group of Inorganic–Nonmetallic Materials, Institute of Materials Engineering, Technische Universität Ilmenau, D-98684 Ilmenau, Germany', 'institution_ids': ['https://openalex.org/I119449181']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5062303592', 'display_name': 'Steffen Strehle', 'orcid': 'https://orcid.org/0000-0002-1261-2894'}, 'institutions': [{'id': 'https://openalex.org/I119449181', 'display_name': 'Technische Universität Ilmenau', 'ror': 'https://ror.org/01weqhp73', 'country_code': 'DE', 'type': 'education', 'lineage': ['https://openalex.org/I119449181']}], 'countries': ['DE'], 'is_corresponding': False, 'raw_author_name': 'Steffen Strehle', 'raw_affiliation_strings': ['Microsystems Technology Group, Institute of Micro- and Nanotechnologies, Technische Universität Ilmenau, D-98684 Ilmenau, Germany'], 'affiliations': [{'raw_affiliation_string': 'Microsystems Technology Group, Institute of Micro- and Nanotechnologies, Technische Universität Ilmenau, D-98684 Ilmenau, Germany', 'institution_ids': ['https://openalex.org/I119449181']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5057636478', 'display_name': 'Edda Rädlein', 'orcid': 'https://orcid.org/0000-0001-9205-9488'}, 'institutions': [{'id': 'https://openalex.org/I119449181', 'display_name': 'Technische Universität Ilmenau', 'ror': 'https://ror.org/01weqhp73', 'country_code': 'DE', 'type': 'education', 'lineage': ['https://openalex.org/I119449181']}], 'countries': ['DE'], 'is_corresponding': False, 'raw_author_name': 'Edda Rädlein', 'raw_affiliation_strings': ['Group of Inorganic–Nonmetallic Materials, Institute of Materials Engineering, Technische Universität Ilmenau, D-98684 Ilmenau, Germany'], 'affiliations': [{'raw_affiliation_string': 'Group of Inorganic–Nonmetallic Materials, Institute of Materials Engineering, Technische Universität Ilmenau, D-98684 Ilmenau, Germany', 'institution_ids': ['https://openalex.org/I119449181']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 1, 'corresponding_author_ids': ['https://openalex.org/A5058603763'], 'corresponding_institution_ids': ['https://openalex.org/I119449181'], 'apc_list': {'value': 1000, 'currency': 'CHF', 'value_usd': 1082, 'provenance': 'doaj'}, 'apc_paid': {'value': 1000, 'currency': 'CHF', 'value_usd': 1082, 'provenance': 'doaj'}, 'fwci': 1.298, 'has_fulltext': True, 'fulltext_origin': 'pdf', 'cited_by_count': 5, 'citation_normalized_percentile': {'value': 0.999985, 'is_in_top_1_percent': True, 'is_in_top_10_percent': True}, 'cited_by_percentile_year': {'min': 90, 'max': 92}, 'biblio': {'volume': '4', 'issue': '3', 'first_page': '213', 'last_page': '234'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T10781', 'display_name': 'Plasma Diagnostics and Applications', 'score': 0.9971, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T10781', 'display_name': 'Plasma Diagnostics and Applications', 'score': 0.9971, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10313', 'display_name': 'Surface Modification and Superhydrophobicity', 'score': 0.9919, 'subfield': {'id': 'https://openalex.org/subfields/2508', 'display_name': 'Surfaces, Coatings and Films'}, 'field': {'id': 'https://openalex.org/fields/25', 'display_name': 'Materials Science'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T11169', 'display_name': 'Silicon Nanostructures and Photoluminescence', 'score': 0.9915, 'subfield': {'id': 'https://openalex.org/subfields/2505', 'display_name': 'Materials Chemistry'}, 'field': {'id': 'https://openalex.org/fields/25', 'display_name': 'Materials Science'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/isotropic-etching', 'display_name': 'Isotropic etching', 'score': 0.831367}, {'id': 'https://openalex.org/keywords/dry-etching', 'display_name': 'Dry etching', 'score': 0.62458026}, {'id': 'https://openalex.org/keywords/plasma-etching', 'display_name': 'Plasma Etching', 'score': 0.59610003}], 'concepts': [{'id': 'https://openalex.org/C33220542', 'wikidata': 'https://www.wikidata.org/wiki/Q6086567', 'display_name': 'Isotropic etching', 'level': 4, 'score': 0.831367}, {'id': 'https://openalex.org/C100460472', 'wikidata': 'https://www.wikidata.org/wiki/Q2368605', 'display_name': 'Etching (microfabrication)', 'level': 3, 'score': 0.822656}, {'id': 'https://openalex.org/C130472188', 'wikidata': 'https://www.wikidata.org/wiki/Q1640159', 'display_name': 'Reactive-ion etching', 'level': 4, 'score': 0.8045955}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.65283865}, {'id': 'https://openalex.org/C1291036', 'wikidata': 'https://www.wikidata.org/wiki/Q1191918', 'display_name': 'Dry etching', 'level': 4, 'score': 0.62458026}, {'id': 'https://openalex.org/C107187091', 'wikidata': 'https://www.wikidata.org/wiki/Q2392011', 'display_name': 'Plasma etching', 'level': 4, 'score': 0.59610003}, {'id': 'https://openalex.org/C82706917', 'wikidata': 'https://www.wikidata.org/wiki/Q10251', 'display_name': 'Plasma', 'level': 2, 'score': 0.41405547}, {'id': 'https://openalex.org/C113196181', 'wikidata': 'https://www.wikidata.org/wiki/Q485223', 'display_name': 'Analytical Chemistry (journal)', 'level': 2, 'score': 0.40973642}, {'id': 'https://openalex.org/C42360764', 'wikidata': 'https://www.wikidata.org/wiki/Q83588', 'display_name': 'Chemical engineering', 'level': 1, 'score': 0.3418404}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.30851853}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.23485538}, {'id': 'https://openalex.org/C2779227376', 'wikidata': 'https://www.wikidata.org/wiki/Q6505497', 'display_name': 'Layer (electronics)', 'level': 2, 'score': 0.16890728}, {'id': 'https://openalex.org/C43617362', 'wikidata': 'https://www.wikidata.org/wiki/Q170050', 'display_name': 'Chromatography', 'level': 1, 'score': 0.06561473}, {'id': 'https://openalex.org/C121332964', 'wikidata': 'https://www.wikidata.org/wiki/Q413', 'display_name': 'Physics', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C62520636', 'wikidata': 'https://www.wikidata.org/wiki/Q944', 'display_name': 'Quantum mechanics', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C127413603', 'wikidata': 'https://www.wikidata.org/wiki/Q11023', 'display_name': 'Engineering', 'level': 0, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': True, 'landing_page_url': 'https://doi.org/10.3390/solids4030014', 'pdf_url': 'https://www.mdpi.com/2673-6497/4/3/14/pdf?version=1692611510', 'source': {'id': 'https://openalex.org/S4210235027', 'display_name': 'Solids', 'issn_l': '2673-6497', 'issn': ['2673-6497'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310310987', 'host_organization_name': 'Multidisciplinary Digital Publishing Institute', 'host_organization_lineage': ['https://openalex.org/P4310310987'], 'host_organization_lineage_names': ['Multidisciplinary Digital Publishing Institute'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}], 'best_oa_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.3390/solids4030014', 'pdf_url': 'https://www.mdpi.com/2673-6497/4/3/14/pdf?version=1692611510', 'source': {'id': 'https://openalex.org/S4210235027', 'display_name': 'Solids', 'issn_l': '2673-6497', 'issn': ['2673-6497'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310310987', 'host_organization_name': 'Multidisciplinary Digital Publishing Institute', 'host_organization_lineage': ['https://openalex.org/P4310310987'], 'host_organization_lineage_names': ['Multidisciplinary Digital Publishing Institute'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'sustainable_development_goals': [], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 47, 'referenced_works': ['https://openalex.org/W1548169695', 'https://openalex.org/W1647551444', 'https://openalex.org/W1954513721', 'https://openalex.org/W1966245317', 'https://openalex.org/W1967709792', 'https://openalex.org/W1977787700', 'https://openalex.org/W1980842109', 'https://openalex.org/W1983414095', 'https://openalex.org/W1989883432', 'https://openalex.org/W1994863929', 'https://openalex.org/W1995454289', 'https://openalex.org/W1998773400', 'https://openalex.org/W2000594874', 'https://openalex.org/W2002912825', 'https://openalex.org/W2012583453', 'https://openalex.org/W2013013079', 'https://openalex.org/W2013712421', 'https://openalex.org/W2025448468', 'https://openalex.org/W2036266711', 'https://openalex.org/W2037666471', 'https://openalex.org/W2043736320', 'https://openalex.org/W2047100016', 'https://openalex.org/W2048110599', 'https://openalex.org/W2061303233', 'https://openalex.org/W2065117114', 'https://openalex.org/W2069266813', 'https://openalex.org/W2076446241', 'https://openalex.org/W2081124609', 'https://openalex.org/W2131300332', 'https://openalex.org/W2138807510', 'https://openalex.org/W2152169113', 'https://openalex.org/W2166518597', 'https://openalex.org/W2322613703', 'https://openalex.org/W2483443490', 'https://openalex.org/W2493880907', 'https://openalex.org/W2501413795', 'https://openalex.org/W2593953953', 'https://openalex.org/W2724287956', 'https://openalex.org/W2766028269', 'https://openalex.org/W2783889314', 'https://openalex.org/W2790409533', 'https://openalex.org/W2795523027', 'https://openalex.org/W2883939956', 'https://openalex.org/W2941940440', 'https://openalex.org/W2964095150', 'https://openalex.org/W3133161027', 'https://openalex.org/W4237311543'], 'related_works': ['https://openalex.org/W4387743859', 'https://openalex.org/W2990622264', 'https://openalex.org/W2765886561', 'https://openalex.org/W2542354647', 'https://openalex.org/W2495723748', 'https://openalex.org/W2094633807', 'https://openalex.org/W2082133582', 'https://openalex.org/W2070736010', 'https://openalex.org/W1991288435', 'https://openalex.org/W19452786'], 'abstract_inverted_index': {'Photosensitive': [0], 'glasses': [1, 43], 'for': [2, 23, 93, 97], 'radiation-induced': [3], '3D': [4], 'microstructuring,': [5], 'due': [6], 'to': [7, 30, 50, 89, 157, 253], 'their': [8, 45], 'optical': [9], 'transparency': [10], 'and': [11, 14, 47, 66, 82, 140, 149, 203, 241, 250, 258], 'thermal,': [12], 'mechanical,': [13], 'chemical': [15, 54, 99, 119, 170, 192], 'resistance,': [16], 'enable': [17], 'the': [18, 38, 51, 129, 133, 137, 164, 173, 177, 186, 194, 223, 234, 238, 254], 'use': [19], 'of': [20, 41, 61, 79, 132, 196, 229, 237], 'new': [21, 59], 'strategies': [22], 'numerous': [24], 'microscale': [25], 'applications,': [26], 'ranging': [27], 'from': [28, 87, 209, 222], 'optics': [29], 'biomedical': [31], 'systems.': [32], 'In': [33], 'this': [34], 'context,': [35], 'we': [36], 'investigated': [37], 'plasma': [39, 174, 197, 213, 224], 'etching': [40, 55, 71, 113, 120, 175, 225, 235], 'photosensitive': [42], 'after': [44, 146], 'exposure': [46, 148], 'compared': [48], 'it': [49], 'established': [52], 'wet': [53, 98, 169, 191], 'method,': [56], 'which': [57, 206], 'offers': [58], 'degrees': [60], 'freedom': [62], 'in': [63, 251], 'microstructuring': [64], 'control': [65], 'microsystem': [67], 'fabrication.': [68], 'A': [69, 125], 'CF4/H2': [70], 'gas': [72], 'mixture': [73], 'with': [74], 'a': [75, 83, 118, 218], 'constant': [76], 'volumetric': [77], 'flow': [78], '30': [80], 'sccm': [81], 'variable': [84], 'H2': [85], 'concentration': [86], '0%': [88], '40%': [90], 'was': [91, 109], 'utilized': [92], 'plasma-based': [94], 'etching,': [95, 100, 193, 214], 'while': [96], 'diluted': [101], 'hydrofluoric': [102], 'acid': [103], '(1%': [104], '≤': [105, 107], 'cHF': [106], '20%)': [108], 'used.': [110], 'Therefore,': [111], 'both': [112], 'processes': [114], 'are': [115, 245], 'based': [116, 247], 'on': [117, 233, 248], 'attack': [121], 'involving': [122], 'fluorine': [123], 'ions.': [124], 'key': [126], 'result': [127], 'is': [128], 'observed': [130], 'reversion': [131], 'etch': [134, 256], 'selectivity': [135], 'between': [136], 'initial': [138], 'glassy': [139, 178], 'partially': [141, 187, 242], 'crystallized': [142, 153, 243], 'parts': [143, 154, 167], 'that': [144], 'evolve': [145], 'UV': [147], 'thermal': [150], 'treatment.': [151], 'The': [152, 227], 'were': [155], 'found': [156], 'be': [158], '27': [159], 'times': [160, 183], 'more': [161], 'soluble': [162], 'than': [163, 185], 'unexposed': [165], 'glass': [166, 240], 'during': [168, 212], 'etching.': [171], 'During': [172], 'process,': [176], 'components': [179], 'dissolve': [180], 'approximately': [181], '2.5': [182], 'faster': [184], 'crystalline': [188], 'components.': [189], 'Unlike': [190], 'surfaces': [195], 'etched': [198], 'photostructured': [199], 'samples': [200], 'showed': [201], 'cone-': [202], 'truncated-cone-shaped': [204], 'topographies,': [205], 'supposedly': [207], 'resulted': [208], 'self-masking': [210], 'effects': [211], 'as': [215, 217], 'well': [216], 'distinct': [219], 'physical': [220], 'contribution': [221], 'process.': [226], 'influences': [228], 'various': [230], 'water': [231], 'species': [232], 'behaviors': [236], 'homogeneous': [239], 'material': [244], 'discussed': [246], 'FTIR-ATR': [249], 'relation': [252], 'respective': [255], 'rates': [257], 'SNMS': [259], 'measurements.': [260]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W4386033027', 'counts_by_year': [{'year': 2024, 'cited_by_count': 3}, {'year': 2023, 'cited_by_count': 2}], 'updated_date': '2024-12-25T22:57:38.275603', 'created_date': '2023-08-22'}