Title: Multi-wavelength combination source with fringe pattern transform technique to reduce the equivalent coherence length in white light interferometry
Abstract: Coherence length is one of the key factors to determine the measurement resolution in white light interferometry. By the use of multi-wavelength combination source, the equivalent coherence length can be greatly reduced. In this work, the multi-wavelength combination source together with the fringe pattern transform technique is used to further reduce the equivalent coherence length and achieve a stable, high precision white light interferometric measurement.
Publication Year: 2000
Publication Date: 2000-08-01
Language: en
Type: article
Indexed In: ['crossref']
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