Title: Recent Advances in White-Light Interferometry: Speed Improvement and Transparent Film Profiling
Abstract: Two major shortcomings in white-light interferometric surface measurement are 1) slow measurement speed, and 2) error caused by a transparent film on the surface. This paper introduces new developments to solve these problems.
Publication Year: 2006
Publication Date: 2006-01-01
Language: en
Type: article
Indexed In: ['crossref']
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