Title: White light interferometry, a method for optical 3D-inspection of advanced packages
Abstract: White light interferometry is a measuring method to acquire the shape of 3D surfaces very accurately. The paper presents an analysis of white light interferometry for its applicability in sensors for the assembly process of advanced packages. Aspects of the realization and the practical use of this measuring method for area array components are discussed.
Publication Year: 2005
Publication Date: 2005-08-10
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 1
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