Abstract: A perspective on the analysis of surfaces and interfaces instrumentation for SIMS basic aspects of sputter depth profiling quantitative analysis using sputtering techniques - secondary ion and sputtered neutral mass spectrometry dynamic SIMS and its applications in microelectronics static SIMS - surface analysis of organic materials sputtered neutral mass spectrometry (SNMS) ion scattering spectroscopic techniques medium energy ion scattering.
Publication Year: 1992
Publication Date: 1992-01-01
Language: en
Type: book
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Cited By Count: 54
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