Title: A comparison of SIMS with other techniques based on ion-beam solid interactions
Abstract: A short survey will be given of processes involved in the interactions of ion beams with solids viz: ion reflection, sputtering, recoil and cascade mixing. A number of methods are based on the detection of particles emitted from a solid due to these interactions: Secondary Ion Mass Spectrometry (SIMS), Sputtered-Neutrals Mass Spectrometry (SNMS), Bombardment-induced Light Emission (BLE), Proton-Induced X-ray Emission (PIXE) (detection and photons) and ion scattering techniques viz: Low Energy Ion Scattering (LEIS), and High Energy Ion Scattering (HEIS), based on the energy analysis of the backscattered ions. A comparison of SIMS with some of these methods will be given with respect to: element range and resolution, detection limit, accuracy and precision (quantification), information depth, depth profiling (consumptive and non-consumptive) and depth resolution, element mapping and lateral resolution, chemical and physical structures, analysis of organic samples, problems with insulating samples.
Publication Year: 1984
Publication Date: 1984-01-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 23
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