Abstract:Energy Dispersive X-ray (EDX) is a commonly used tool for elemental analysis in failure analysis for years. EDX tool can perform qualitative and quantitative elemental analysis to identify various che...Energy Dispersive X-ray (EDX) is a commonly used tool for elemental analysis in failure analysis for years. EDX tool can perform qualitative and quantitative elemental analysis to identify various chemical elements and characterize the material properties. Computer-aided imaging is a rapidly growing area that has significantly enhanced the EDX capability in recent years. In this paper, we will share some newly developed EDX elemental mapping techniques including QMap and ROI map, and spectra processing using peaks deconvolution. These techniques have advanced the elemental analysis in both graphical and numerical approaches.Read More
Publication Year: 2020
Publication Date: 2020-07-20
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
AI Researcher Chatbot
Get quick answers to your questions about the article from our AI researcher chatbot