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{'id': 'https://openalex.org/W2405291203', 'doi': 'https://doi.org/10.1063/1.4947949', 'title': 'Effect of growth rate on crystallization of HfO2 thin films deposited by RF magnetron sputtering', 'display_name': 'Effect of growth rate on crystallization of HfO2 thin films deposited by RF magnetron sputtering', 'publication_year': 2016, 'publication_date': '2016-01-01', 'ids': {'openalex': 'https://openalex.org/W2405291203', 'doi': 'https://doi.org/10.1063/1.4947949', 'mag': '2405291203'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1063/1.4947949', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S2764696622', 'display_name': 'AIP conference proceedings', 'issn_l': '0094-243X', 'issn': ['0094-243X', '1551-7616', '1935-0465'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320257', 'host_organization_name': 'American Institute of Physics', 'host_organization_lineage': ['https://openalex.org/P4310320257'], 'host_organization_lineage_names': ['American Institute of Physics'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'proceedings-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5070392085', 'display_name': 'Dhanunjaya Munthala', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I36893310', 'display_name': 'University of Hyderabad', 'ror': 'https://ror.org/04a7rxb17', 'country_code': 'IN', 'type': 'education', 'lineage': ['https://openalex.org/I36893310']}], 'countries': ['IN'], 'is_corresponding': False, 'raw_author_name': 'M. Dhanunjaya', 'raw_affiliation_strings': ['School of Physics, University of Hyderabad, Hyderabad, India 500046'], 'affiliations': [{'raw_affiliation_string': 'School of Physics, University of Hyderabad, Hyderabad, India 500046', 'institution_ids': ['https://openalex.org/I36893310']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5024442053', 'display_name': 'N. Manikanthababu', 'orcid': 'https://orcid.org/0000-0002-2727-1340'}, 'institutions': [{'id': 'https://openalex.org/I36893310', 'display_name': 'University of Hyderabad', 'ror': 'https://ror.org/04a7rxb17', 'country_code': 'IN', 'type': 'education', 'lineage': ['https://openalex.org/I36893310']}], 'countries': ['IN'], 'is_corresponding': False, 'raw_author_name': 'N. Manikanthababu', 'raw_affiliation_strings': ['School of Physics, University of Hyderabad, Hyderabad, India 500046'], 'affiliations': [{'raw_affiliation_string': 'School of Physics, University of Hyderabad, Hyderabad, India 500046', 'institution_ids': ['https://openalex.org/I36893310']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5021300522', 'display_name': 'A. P. Pathak', 'orcid': 'https://orcid.org/0000-0002-6394-0943'}, 'institutions': [{'id': 'https://openalex.org/I36893310', 'display_name': 'University of Hyderabad', 'ror': 'https://ror.org/04a7rxb17', 'country_code': 'IN', 'type': 'education', 'lineage': ['https://openalex.org/I36893310']}], 'countries': ['IN'], 'is_corresponding': False, 'raw_author_name': 'A. P. Pathak', 'raw_affiliation_strings': ['School of Physics, University of Hyderabad, Hyderabad, India 500046'], 'affiliations': [{'raw_affiliation_string': 'School of Physics, University of Hyderabad, Hyderabad, India 500046', 'institution_ids': ['https://openalex.org/I36893310']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5016796359', 'display_name': 'S. Venugopal Rao', 'orcid': 'https://orcid.org/0000-0001-5361-7256'}, 'institutions': [{'id': 'https://openalex.org/I36893310', 'display_name': 'University of Hyderabad', 'ror': 'https://ror.org/04a7rxb17', 'country_code': 'IN', 'type': 'education', 'lineage': ['https://openalex.org/I36893310']}], 'countries': ['IN'], 'is_corresponding': False, 'raw_author_name': 'S. V. S. Nageswara Rao', 'raw_affiliation_strings': ['School of Physics, University of Hyderabad, Hyderabad, India 500046'], 'affiliations': [{'raw_affiliation_string': 'School of Physics, University of Hyderabad, Hyderabad, India 500046', 'institution_ids': ['https://openalex.org/I36893310']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 1, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': None, 'apc_paid': None, 'fwci': 0.363, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 8, 'citation_normalized_percentile': {'value': 0.680196, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 84, 'max': 85}, 'biblio': {'volume': '1731', 'issue': None, 'first_page': '080071', 'last_page': '080071'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T10472', 'display_name': 'Semiconductor materials and devices', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T10472', 'display_name': 'Semiconductor materials and devices', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T14117', 'display_name': 'Integrated Circuits and Semiconductor Failure Analysis', 'score': 0.9983, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T12588', 'display_name': 'Electronic and Structural Properties of Oxides', 'score': 0.9971, 'subfield': {'id': 'https://openalex.org/subfields/2505', 'display_name': 'Materials Chemistry'}, 'field': {'id': 'https://openalex.org/fields/25', 'display_name': 'Materials Science'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/icon', 'display_name': 'Icon', 'score': 0.91275334}, {'id': 'https://openalex.org/keywords/download', 'display_name': 'Download', 'score': 0.44677567}, {'id': 'https://openalex.org/keywords/cavity-magnetron', 'display_name': 'Cavity magnetron', 'score': 0.42079645}], 'concepts': [{'id': 'https://openalex.org/C2778447006', 'wikidata': 'https://www.wikidata.org/wiki/Q1156474', 'display_name': 'Icon', 'level': 2, 'score': 0.91275334}, {'id': 'https://openalex.org/C2778805511', 'wikidata': 'https://www.wikidata.org/wiki/Q1713', 'display_name': 'Citation', 'level': 2, 'score': 0.5861296}, {'id': 'https://openalex.org/C41008148', 'wikidata': 'https://www.wikidata.org/wiki/Q21198', 'display_name': 'Computer science', 'level': 0, 'score': 0.52619153}, {'id': 'https://openalex.org/C61427134', 'wikidata': 'https://www.wikidata.org/wiki/Q847609', 'display_name': 'Sputter deposition', 'level': 4, 'score': 0.50963354}, {'id': 'https://openalex.org/C2780154274', 'wikidata': 'https://www.wikidata.org/wiki/Q7126717', 'display_name': 'Download', 'level': 2, 'score': 0.44677567}, {'id': 'https://openalex.org/C123408415', 'wikidata': 'https://www.wikidata.org/wiki/Q194154', 'display_name': 'Cavity magnetron', 'level': 4, 'score': 0.42079645}, {'id': 'https://openalex.org/C23123220', 'wikidata': 'https://www.wikidata.org/wiki/Q816826', 'display_name': 'Information retrieval', 'level': 1, 'score': 0.41125703}, {'id': 'https://openalex.org/C136764020', 'wikidata': 'https://www.wikidata.org/wiki/Q466', 'display_name': 'World Wide Web', 'level': 1, 'score': 0.3752923}, {'id': 'https://openalex.org/C22423302', 'wikidata': 'https://www.wikidata.org/wiki/Q898444', 'display_name': 'Sputtering', 'level': 3, 'score': 0.3083629}, {'id': 'https://openalex.org/C19067145', 'wikidata': 'https://www.wikidata.org/wiki/Q1137203', 'display_name': 'Thin film', 'level': 2, 'score': 0.24552146}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.22438571}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.15129784}, {'id': 'https://openalex.org/C199360897', 'wikidata': 'https://www.wikidata.org/wiki/Q9143', 'display_name': 'Programming language', 'level': 1, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1063/1.4947949', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S2764696622', 'display_name': 'AIP conference proceedings', 'issn_l': '0094-243X', 'issn': ['0094-243X', '1551-7616', '1935-0465'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320257', 'host_organization_name': 'American Institute of Physics', 'host_organization_lineage': ['https://openalex.org/P4310320257'], 'host_organization_lineage_names': ['American Institute of Physics'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 7, 'referenced_works': ['https://openalex.org/W1964490512', 'https://openalex.org/W2001697645', 'https://openalex.org/W2023578199', 'https://openalex.org/W2074178516', 'https://openalex.org/W2077844584', 'https://openalex.org/W2152565978', 'https://openalex.org/W2332716615'], 'related_works': ['https://openalex.org/W4254148944', 'https://openalex.org/W3193980021', 'https://openalex.org/W3139358434', 'https://openalex.org/W3116458923', 'https://openalex.org/W2944705329', 'https://openalex.org/W2092364266', 'https://openalex.org/W2088091229', 'https://openalex.org/W2029460333', 'https://openalex.org/W2009023799', 'https://openalex.org/W1969786090'], 'abstract_inverted_index': {'Views': [0, 2], 'Icon': [1, 15, 22, 28], 'Article': [3], 'contents': [4], 'Figures': [5], '&': [6], 'tables': [7], 'Video': [8], 'Audio': [9], 'Supplementary': [10], 'Data': [11], 'Peer': [12], 'Review': [13], 'Share': [14, 16], 'Twitter': [17], 'Facebook': [18], 'Reddit': [19], 'LinkedIn': [20], 'Tools': [21, 23], 'Reprints': [24], 'and': [25], 'Permissions': [26], 'Cite': [27, 29], 'Search': [30, 86, 93, 106, 108, 110], 'Site': [31], 'Citation': [32], 'M.': [33], 'Dhanunjaya,': [34], 'N.': [35], 'Manikanthababu,': [36], 'A.': [37], 'P.': [38], 'Pathak,': [39], 'S.': [40, 42], 'V.': [41], 'Nageswara': [43], 'Rao;': [44], 'Effect': [45], 'of': [46, 51], 'growth': [47], 'rate': [48], 'on': [49], 'crystallization': [50], 'HfO2': [52], 'thin': [53], 'films': [54], 'deposited': [55], 'by': [56], 'RF': [57], 'magnetron': [58], 'sputtering.': [59], 'AIP': [60], 'Conf.': [61], 'Proc.': [62], '23': [63], 'May': [64], '2016;': [65], '1731': [66], '(1):': [67], '080071.': [68], 'https://doi.org/10.1063/1.4947949': [69], 'Download': [70], 'citation': [71], 'file:': [72], 'Ris': [73], '(Zotero)': [74], 'Reference': [75], 'Manager': [76], 'EasyBib': [77], 'Bookends': [78], 'Mendeley': [79], 'Papers': [80], 'EndNote': [81], 'RefWorks': [82], 'BibTex': [83], 'toolbar': [84, 89], 'search': [85, 90, 91, 99], 'Dropdown': [87], 'Menu': [88], 'input': [92, 94], 'auto': [95], 'suggest': [96], 'filter': [97], 'your': [98], 'All': [100], 'ContentAIP': [101], 'Publishing': [102], 'PortfolioAIP': [103], 'Conference': [104], 'Proceedings': [105], 'Advanced': [107], '|Citation': [109]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2405291203', 'counts_by_year': [{'year': 2023, 'cited_by_count': 2}, {'year': 2022, 'cited_by_count': 2}, {'year': 2020, 'cited_by_count': 1}, {'year': 2018, 'cited_by_count': 2}, {'year': 2017, 'cited_by_count': 1}], 'updated_date': '2025-01-05T06:43:07.466369', 'created_date': '2016-06-24'}