Title: Analysis of Modal Characteristics of Comb-type Quartz Gyroscope
Abstract: The micro gyroscope quartz tuning fork's vibration mode characteristics and the sensor electrode's charge distribution and voltage under different configuration were analyzed by modern finite element analysis tool COMSOL Multiphysics.The section size and electrode configuration of the gyroscope with higher sensitivity were found,which could afford the necessary reference to the follow-up circuit design.The study is helpful to predict the resonant frequency,discover the design defect,shorten the design period.
Publication Year: 2009
Publication Date: 2009-01-01
Language: en
Type: article
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