Abstract: A series of parameter can be obtained though the modal analysis of MEMS gyroscope by the element finite methol.Based on electrostatic comb-like driver structure,the structure of MEMS gyroscope is designed according to performance index.The sensing mode and drive mode are analyzed based on finite element method with ANSYS softhard.The reference of analysis and correction for the designed structure is got.The Q-factor of the MEMS gyroscope is also increased.
Publication Year: 2007
Publication Date: 2007-01-01
Language: en
Type: article
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