Title: Principle and design of micromachined air-coupled electrostatic ultrasonic transducer
Abstract:The frequency equation by treating the electrostatic ultrasonic transducer as a mass -spring oscillator is analyzed. A air-coupled electrostatic ultrasonic transducer is manufactured by using the diel...The frequency equation by treating the electrostatic ultrasonic transducer as a mass -spring oscillator is analyzed. A air-coupled electrostatic ultrasonic transducer is manufactured by using the dielectric films and a metal rectangle grooved back-plate. Its resonant frequency is 42.08 kHz. Through the experiment, the transmitting and receiving response of the transducer are detected. The experiment results showed that the transducer has resonant frequency of 42.8 kHz and its bandwidth up to the 50% of it.Read More
Publication Year: 2001
Publication Date: 2001-01-01
Language: en
Type: article
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