Title: study on step sidewall tilt in ion beam etching of Fresnel lens
Abstract: Based on the theory of scalar diffraction and on the Fourier optics. a mathematical model is established. The effect of step sidewall tilt on diffractive efficiency of Fresnel lens is analyzed. In our experiment, the factor affecting step sidewall tilt, surface roughness and etching speed are analyzed. The optimal technical parameters of ion beam etching of Fresnel lens are confirmed.
Publication Year: 2000
Publication Date: 2000-01-01
Language: en
Type: article
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