Title: Experiments on the Deformation of MEMS Mciro-Cantilever Using AFM
Abstract: Bending deformation of microscale cantilever has been investigated using an atomic force microscope(AFM). The deformation of the elastic support of the cantilever is considered due to the error between the theoretical calculation and the experimental data. Therefore, support torsion stiffness is proposed to revise the current deformation calculation formula, which is proved to be available and effective to the micro cantilever with longer effective length. However, for the cantilever with shorter effective length, there are several additional reasons for the error, e.g., nonlinear deformation of AFM probe, contact stiffness etc. Further research is suggested.
Publication Year: 2005
Publication Date: 2005-01-01
Language: en
Type: article
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