Title: Nanomachining analysis of a multi-cracked atomic force microscope cantilever based on a modified couple stress theory
Abstract: The vibration analysis of an atomic force microscope (AFM) cantilever with an arbitrary number of cracks during the nanomachining process is studied based on the modified couple stress theory. The cantilever with [Formula: see text] cracks is divided into [Formula: see text] segments by the cracks and a rotational spring is used to simulate each crack. An analytical expression for the vibration frequency and displacement of the cracked cantilever is derived. According to the analysis, in addition, the displacement increases with an increase in the number of cracks and crack flexibilities. For nanomachining, the displacement of the cantilever tip is related to the depth of cut. The area under the displacement-time curve implies the material removal rate. The present study is useful for the design of an AFM-based nanomachining cantilever with cracks.
Publication Year: 2015
Publication Date: 2015-11-04
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 3
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