Get quick answers to your questions about the article from our AI researcher chatbot
{'id': 'https://openalex.org/W2316410192', 'doi': 'https://doi.org/10.1007/bf03220647', 'title': 'The plasma etching of electronic material', 'display_name': 'The plasma etching of electronic material', 'publication_year': 1994, 'publication_date': '1994-03-01', 'ids': {'openalex': 'https://openalex.org/W2316410192', 'doi': 'https://doi.org/10.1007/bf03220647', 'mag': '2316410192'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1007/bf03220647', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S116826539', 'display_name': 'JOM', 'issn_l': '1047-4838', 'issn': ['1047-4838', '1543-1851'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310319900', 'host_organization_name': 'Springer Science+Business Media', 'host_organization_lineage': ['https://openalex.org/P4310319965', 'https://openalex.org/P4310319900'], 'host_organization_lineage_names': ['Springer Nature', 'Springer Science+Business Media'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5027826865', 'display_name': 'T. D. Mantéi', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I63135867', 'display_name': 'University of Cincinnati', 'ror': 'https://ror.org/01e3m7079', 'country_code': 'US', 'type': 'education', 'lineage': ['https://openalex.org/I63135867']}], 'countries': ['US'], 'is_corresponding': True, 'raw_author_name': 'Thomas D. Mantei', 'raw_affiliation_strings': ['University of Cincinnati, USA'], 'affiliations': [{'raw_affiliation_string': 'University of Cincinnati, USA', 'institution_ids': ['https://openalex.org/I63135867']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 1, 'corresponding_author_ids': ['https://openalex.org/A5027826865'], 'corresponding_institution_ids': ['https://openalex.org/I63135867'], 'apc_list': {'value': 2790, 'currency': 'EUR', 'value_usd': 3590, 'provenance': 'doaj'}, 'apc_paid': None, 'fwci': 0.0, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 1, 'citation_normalized_percentile': {'value': 0.358139, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 53, 'max': 61}, 'biblio': {'volume': '46', 'issue': '3', 'first_page': '36', 'last_page': '39'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T10781', 'display_name': 'Plasma Diagnostics and Applications', 'score': 0.9944, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T10781', 'display_name': 'Plasma Diagnostics and Applications', 'score': 0.9944, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10377', 'display_name': 'Metal and Thin Film Mechanics', 'score': 0.9821, 'subfield': {'id': 'https://openalex.org/subfields/2211', 'display_name': 'Mechanics of Materials'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10472', 'display_name': 'Semiconductor materials and devices', 'score': 0.9805, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/microelectronics', 'display_name': 'Microelectronics', 'score': 0.832355}, {'id': 'https://openalex.org/keywords/plasma-etching', 'display_name': 'Plasma Etching', 'score': 0.68511516}, {'id': 'https://openalex.org/keywords/dry-etching', 'display_name': 'Dry etching', 'score': 0.5709416}, {'id': 'https://openalex.org/keywords/isotropic-etching', 'display_name': 'Isotropic etching', 'score': 0.5344032}], 'concepts': [{'id': 'https://openalex.org/C100460472', 'wikidata': 'https://www.wikidata.org/wiki/Q2368605', 'display_name': 'Etching (microfabrication)', 'level': 3, 'score': 0.85839605}, {'id': 'https://openalex.org/C187937830', 'wikidata': 'https://www.wikidata.org/wiki/Q175403', 'display_name': 'Microelectronics', 'level': 2, 'score': 0.832355}, {'id': 'https://openalex.org/C130472188', 'wikidata': 'https://www.wikidata.org/wiki/Q1640159', 'display_name': 'Reactive-ion etching', 'level': 4, 'score': 0.7900497}, {'id': 'https://openalex.org/C107187091', 'wikidata': 'https://www.wikidata.org/wiki/Q2392011', 'display_name': 'Plasma etching', 'level': 4, 'score': 0.68511516}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.6803593}, {'id': 'https://openalex.org/C136525101', 'wikidata': 'https://www.wikidata.org/wiki/Q5428139', 'display_name': 'Fabrication', 'level': 3, 'score': 0.62954575}, {'id': 'https://openalex.org/C82706917', 'wikidata': 'https://www.wikidata.org/wiki/Q10251', 'display_name': 'Plasma', 'level': 2, 'score': 0.59142023}, {'id': 'https://openalex.org/C1291036', 'wikidata': 'https://www.wikidata.org/wiki/Q1191918', 'display_name': 'Dry etching', 'level': 4, 'score': 0.5709416}, {'id': 'https://openalex.org/C33220542', 'wikidata': 'https://www.wikidata.org/wiki/Q6086567', 'display_name': 'Isotropic etching', 'level': 4, 'score': 0.5344032}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.44391423}, {'id': 'https://openalex.org/C521977710', 'wikidata': 'https://www.wikidata.org/wiki/Q81163', 'display_name': 'Polymer', 'level': 2, 'score': 0.43245634}, {'id': 'https://openalex.org/C133386390', 'wikidata': 'https://www.wikidata.org/wiki/Q184996', 'display_name': 'Dielectric', 'level': 2, 'score': 0.4308605}, {'id': 'https://openalex.org/C108225325', 'wikidata': 'https://www.wikidata.org/wiki/Q11456', 'display_name': 'Semiconductor', 'level': 2, 'score': 0.42791492}, {'id': 'https://openalex.org/C49040817', 'wikidata': 'https://www.wikidata.org/wiki/Q193091', 'display_name': 'Optoelectronics', 'level': 1, 'score': 0.4244269}, {'id': 'https://openalex.org/C145148216', 'wikidata': 'https://www.wikidata.org/wiki/Q36496', 'display_name': 'Ion', 'level': 2, 'score': 0.42389324}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.22111753}, {'id': 'https://openalex.org/C159985019', 'wikidata': 'https://www.wikidata.org/wiki/Q181790', 'display_name': 'Composite material', 'level': 1, 'score': 0.15673509}, {'id': 'https://openalex.org/C178790620', 'wikidata': 'https://www.wikidata.org/wiki/Q11351', 'display_name': 'Organic chemistry', 'level': 1, 'score': 0.053613603}, {'id': 'https://openalex.org/C71924100', 'wikidata': 'https://www.wikidata.org/wiki/Q11190', 'display_name': 'Medicine', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C204787440', 'wikidata': 'https://www.wikidata.org/wiki/Q188504', 'display_name': 'Alternative medicine', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C121332964', 'wikidata': 'https://www.wikidata.org/wiki/Q413', 'display_name': 'Physics', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C2779227376', 'wikidata': 'https://www.wikidata.org/wiki/Q6505497', 'display_name': 'Layer (electronics)', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C142724271', 'wikidata': 'https://www.wikidata.org/wiki/Q7208', 'display_name': 'Pathology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C62520636', 'wikidata': 'https://www.wikidata.org/wiki/Q944', 'display_name': 'Quantum mechanics', 'level': 1, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1007/bf03220647', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S116826539', 'display_name': 'JOM', 'issn_l': '1047-4838', 'issn': ['1047-4838', '1543-1851'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310319900', 'host_organization_name': 'Springer Science+Business Media', 'host_organization_lineage': ['https://openalex.org/P4310319965', 'https://openalex.org/P4310319900'], 'host_organization_lineage_names': ['Springer Nature', 'Springer Science+Business Media'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 16, 'referenced_works': ['https://openalex.org/W1504175299', 'https://openalex.org/W1966148306', 'https://openalex.org/W1968590512', 'https://openalex.org/W1969328134', 'https://openalex.org/W1979944209', 'https://openalex.org/W1983256684', 'https://openalex.org/W2044924796', 'https://openalex.org/W2048536636', 'https://openalex.org/W2055369081', 'https://openalex.org/W2055542123', 'https://openalex.org/W2073695542', 'https://openalex.org/W2090453192', 'https://openalex.org/W2205590358', 'https://openalex.org/W2443554187', 'https://openalex.org/W4238501854', 'https://openalex.org/W629366480'], 'related_works': ['https://openalex.org/W9341819', 'https://openalex.org/W635001031', 'https://openalex.org/W4387743859', 'https://openalex.org/W2765886561', 'https://openalex.org/W2196738352', 'https://openalex.org/W2094633807', 'https://openalex.org/W2093631838', 'https://openalex.org/W2082133582', 'https://openalex.org/W2045553774', 'https://openalex.org/W2011001474'], 'abstract_inverted_index': None, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2316410192', 'counts_by_year': [], 'updated_date': '2024-12-17T11:53:13.398889', 'created_date': '2016-06-24'}