Title: Integrated Capacitive Position Sensor for Planar Electric Drive
Abstract: Background: To increase speed, rotation stability and positioning accuracy of the planar linear motor (Sawyer motor) the closed-loop control and high-precision position sensor are used. The previously developed capacitive position sensor has several disadvantages that influence the accuracy measurement. Thus, it is necessary to develop the position senser that could allow removing the disadvantages and providing the high accuracy of position measurement. Materials and methods: The developing of software methods of the capacitive sensor signal processing, the developing of software methods of accuracy increasing of 3-DOF planar measurement system are considered. Results: The design of capacitive position sensor integrated into the planar linear motor is presented. The experimental resolution of the sensor is represented. Conclusions: The integrated planar capacitive position sensor allows the sub-micron positioning of planar electric drive.
Publication Year: 2013
Publication Date: 2013-01-01
Language: en
Type: article
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