Title: A built-in displacement sensor for an electrostatic film motor
Abstract: This paper proposes and evaluates a built-in position sensor for an electrostatic motor called a dual excitation multiphase electrostatic drive. The built-in sensor operates on a similar principle to typical capacitance-type linear encoders. The sensor system superimposes a high-frequency sensor signal onto a low-frequency driving signal so that it can share the same electrodes with driving operation of the motor. This paper analyses the sensor principle based on a capacitance network model of the motor that allows us to evaluate the linearity error of the proposed sensor system. The sensor was implemented on a prototype motor to evaluate its performance. The experimental results confirmed that the sensor can work successfully by sharing the same electrodes with the driving operation. The linearity error was found to be 24 µm when no driving signal was applied. As the driving signal was applied, the linearity error was found to increase up to 48 µm.
Publication Year: 2006
Publication Date: 2006-08-31
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 17
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