Title: Simple and low cost fabrication of embedded micro-channels by using a new thick-film photoplastic
Abstract: In this paper we describe new ways to realise micro-channels. The used technologies are based on a novel thick-film photoplastic, the SU-8. This photoresist has outstanding properties, allowing the realisation of high aspect ratio microstructures. It is a simple and low-cost fabrication process. The micro channels developed in this work will be used for the realisation of thermal flow-sensors.
Publication Year: 2002
Publication Date: 2002-11-22
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 128
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