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{'id': 'https://openalex.org/W2071556835', 'doi': 'https://doi.org/10.1007/s005420000046', 'title': 'Fabrication of microstructure using fluorinated polyimide and silicone-based positive photoresist', 'display_name': 'Fabrication of microstructure using fluorinated polyimide and silicone-based positive photoresist', 'publication_year': 2000, 'publication_date': '2000-08-04', 'ids': {'openalex': 'https://openalex.org/W2071556835', 'doi': 'https://doi.org/10.1007/s005420000046', 'mag': '2071556835'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1007/s005420000046', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S54043040', 'display_name': 'Microsystem Technologies', 'issn_l': '0946-7076', 'issn': ['0946-7076', '1432-1858'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310319900', 'host_organization_name': 'Springer Science+Business Media', 'host_organization_lineage': ['https://openalex.org/P4310319965', 'https://openalex.org/P4310319900'], 'host_organization_lineage_names': ['Springer Nature', 'Springer Science+Business Media'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5101601450', 'display_name': 'Tomonori Ito', 'orcid': 'https://orcid.org/0000-0003-1160-9244'}, 'institutions': [{'id': 'https://openalex.org/I2251713219', 'display_name': 'NTT (Japan)', 'ror': 'https://ror.org/00berct97', 'country_code': 'JP', 'type': 'company', 'lineage': ['https://openalex.org/I2251713219']}], 'countries': ['JP'], 'is_corresponding': False, 'raw_author_name': 'T. Ito', 'raw_affiliation_strings': ['NTT Telecommunications Energy Laboratories, 3-1 Morinosaro Wakamiya Atsugi-shi Kanagawa 243-0198 Japan, JP'], 'affiliations': [{'raw_affiliation_string': 'NTT Telecommunications Energy Laboratories, 3-1 Morinosaro Wakamiya Atsugi-shi Kanagawa 243-0198 Japan, JP', 'institution_ids': ['https://openalex.org/I2251713219']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5041123909', 'display_name': 'Ryo Sawada', 'orcid': 'https://orcid.org/0000-0003-4876-5996'}, 'institutions': [{'id': 'https://openalex.org/I2251713219', 'display_name': 'NTT (Japan)', 'ror': 'https://ror.org/00berct97', 'country_code': 'JP', 'type': 'company', 'lineage': ['https://openalex.org/I2251713219']}], 'countries': ['JP'], 'is_corresponding': False, 'raw_author_name': 'R. Sawada', 'raw_affiliation_strings': ['NTT Telecommunications Energy Laboratories, 3-1 Morinosaro Wakamiya Atsugi-shi Kanagawa 243-0198 Japan, JP'], 'affiliations': [{'raw_affiliation_string': 'NTT Telecommunications Energy Laboratories, 3-1 Morinosaro Wakamiya Atsugi-shi Kanagawa 243-0198 Japan, JP', 'institution_ids': ['https://openalex.org/I2251713219']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5074618363', 'display_name': 'Eiji Higurashi', 'orcid': 'https://orcid.org/0000-0002-7154-4203'}, 'institutions': [{'id': 'https://openalex.org/I2251713219', 'display_name': 'NTT (Japan)', 'ror': 'https://ror.org/00berct97', 'country_code': 'JP', 'type': 'company', 'lineage': ['https://openalex.org/I2251713219']}], 'countries': ['JP'], 'is_corresponding': False, 'raw_author_name': 'E. Higurashi', 'raw_affiliation_strings': ['NTT Telecommunications Energy Laboratories, 3-1 Morinosaro Wakamiya Atsugi-shi Kanagawa 243-0198 Japan, JP'], 'affiliations': [{'raw_affiliation_string': 'NTT Telecommunications Energy Laboratories, 3-1 Morinosaro Wakamiya Atsugi-shi Kanagawa 243-0198 Japan, JP', 'institution_ids': ['https://openalex.org/I2251713219']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5057895953', 'display_name': 'Takanori Kiyokura', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I2251713219', 'display_name': 'NTT (Japan)', 'ror': 'https://ror.org/00berct97', 'country_code': 'JP', 'type': 'company', 'lineage': ['https://openalex.org/I2251713219']}], 'countries': ['JP'], 'is_corresponding': False, 'raw_author_name': 'T. Kiyokura', 'raw_affiliation_strings': ['NTT Telecommunications Energy Laboratories, 3-1 Morinosaro Wakamiya Atsugi-shi Kanagawa 243-0198 Japan, JP'], 'affiliations': [{'raw_affiliation_string': 'NTT Telecommunications Energy Laboratories, 3-1 Morinosaro Wakamiya Atsugi-shi Kanagawa 243-0198 Japan, JP', 'institution_ids': ['https://openalex.org/I2251713219']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 1, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': {'value': 2290, 'currency': 'EUR', 'value_usd': 2890, 'provenance': 'doaj'}, 'apc_paid': None, 'fwci': 0.0, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 2, 'citation_normalized_percentile': {'value': 0.511723, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 65, 'max': 69}, 'biblio': {'volume': '6', 'issue': '5', 'first_page': '165', 'last_page': '168'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T11338', 'display_name': 'Advancements in Photolithography Techniques', 'score': 0.9986, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T11338', 'display_name': 'Advancements in Photolithography Techniques', 'score': 0.9986, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T12224', 'display_name': 'Nanofabrication and Lithography Techniques', 'score': 0.9978, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T11301', 'display_name': 'Advanced Surface Polishing Techniques', 'score': 0.9978, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/photoresist', 'display_name': 'Photoresist', 'score': 0.9737855}, {'id': 'https://openalex.org/keywords/silicone-resin', 'display_name': 'Silicone resin', 'score': 0.466111}], 'concepts': [{'id': 'https://openalex.org/C134406635', 'wikidata': 'https://www.wikidata.org/wiki/Q1439684', 'display_name': 'Photoresist', 'level': 3, 'score': 0.9737855}, {'id': 'https://openalex.org/C2780965675', 'wikidata': 'https://www.wikidata.org/wiki/Q145958', 'display_name': 'Polyimide', 'level': 3, 'score': 0.956442}, {'id': 'https://openalex.org/C136525101', 'wikidata': 'https://www.wikidata.org/wiki/Q5428139', 'display_name': 'Fabrication', 'level': 3, 'score': 0.9088952}, {'id': 'https://openalex.org/C87976508', 'wikidata': 'https://www.wikidata.org/wiki/Q1498213', 'display_name': 'Microstructure', 'level': 2, 'score': 0.8422742}, {'id': 'https://openalex.org/C2779769944', 'wikidata': 'https://www.wikidata.org/wiki/Q146439', 'display_name': 'Silicone', 'level': 2, 'score': 0.81906617}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.77003425}, {'id': 'https://openalex.org/C2780125811', 'wikidata': 'https://www.wikidata.org/wiki/Q7515049', 'display_name': 'Silicone resin', 'level': 3, 'score': 0.466111}, {'id': 'https://openalex.org/C159985019', 'wikidata': 'https://www.wikidata.org/wiki/Q181790', 'display_name': 'Composite material', 'level': 1, 'score': 0.43833858}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.36194712}, {'id': 'https://openalex.org/C2779227376', 'wikidata': 'https://www.wikidata.org/wiki/Q6505497', 'display_name': 'Layer (electronics)', 'level': 2, 'score': 0.05964005}, {'id': 'https://openalex.org/C71924100', 'wikidata': 'https://www.wikidata.org/wiki/Q11190', 'display_name': 'Medicine', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C204787440', 'wikidata': 'https://www.wikidata.org/wiki/Q188504', 'display_name': 'Alternative medicine', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C142724271', 'wikidata': 'https://www.wikidata.org/wiki/Q7208', 'display_name': 'Pathology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C2781448156', 'wikidata': 'https://www.wikidata.org/wiki/Q1570182', 'display_name': 'Coating', 'level': 2, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1007/s005420000046', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S54043040', 'display_name': 'Microsystem Technologies', 'issn_l': '0946-7076', 'issn': ['0946-7076', '1432-1858'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310319900', 'host_organization_name': 'Springer Science+Business Media', 'host_organization_lineage': ['https://openalex.org/P4310319965', 'https://openalex.org/P4310319900'], 'host_organization_lineage_names': ['Springer Nature', 'Springer Science+Business Media'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 0, 'referenced_works': [], 'related_works': ['https://openalex.org/W2391029317', 'https://openalex.org/W2376838659', 'https://openalex.org/W2367503477', 'https://openalex.org/W2355239398', 'https://openalex.org/W2348940299', 'https://openalex.org/W2347627379', 'https://openalex.org/W2077237688', 'https://openalex.org/W1982670279', 'https://openalex.org/W1970549528', 'https://openalex.org/W1208823387'], 'abstract_inverted_index': None, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2071556835', 'counts_by_year': [], 'updated_date': '2024-12-13T04:32:52.485291', 'created_date': '2016-06-24'}