Title: Surface concentration of primary ion species and its effect to depth profiling in SIMS analyses
Abstract: In Secondary Ion Mass Spectrometry (SIMS), the presence of primary ions on the sputtering surface is considered to enhance the secondary ion yields. In this work, the surface concentration profiles of Cs primary ions were investigated in details for Si using low energy oxygen primary ion bombardment in order to achieve accurate depth profiling with Cs primary ions.
Publication Year: 2002
Publication Date: 2002-11-14
Language: en
Type: article
Indexed In: ['crossref']
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