Title: Microscope imaging by time-of-flight secondary ion mass spectrometry
Abstract: The concept of Secondary Ion Microscopy, introduced by Castaing et al. [1], is applied to a direct imaging time-of-flight (TOF) mass spectrometer.The ion optical configuration for a par- ticular [2] stigmatic imaging TOF mass spectrometer is reviewed.A number of fundamental factors influencing the mass resolution in any TOF spectrometer are discussed.The question of where micro- scope imaging offers advantages over microprobe imaging in TOF Secondary Ion Mass Spectrometry is addressed.