Title: New Tilting Mechanism of Electron Gun for Reflection High-Energy Electron Diffraction
Abstract:A new type of mechanism for tilting a reflection high-energy electron diffraction (RHEED) gun has been designed and constructed, which enables us to change the glancing angle of the primary electron b...A new type of mechanism for tilting a reflection high-energy electron diffraction (RHEED) gun has been designed and constructed, which enables us to change the glancing angle of the primary electron beam when the specimen surface is located not only at a fixed position but also is moved to other positions. This is an advantage when other measurements are simultaneously undertaken with RHEED. RHEED measurements of a Si(110) surface were performed by placing the Si(110) surface at different positions, and the ability was verified.Read More
Publication Year: 1995
Publication Date: 1995-04-01
Language: en
Type: article
Indexed In: ['crossref']
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