Title: Hybrid-integrated laser-diode micro-external mirror fabricated by (110) silicon micromachining
Abstract: A silicon micromachined micromirror and a laser diode have been successfully integrated. The micromirror acts as an external cavity of a laser diode and was fabricated by anisotropic etching of (110) silicon in conjunction with silicon-to-glass bonding. A mirror displacement of 1.43 µm and coincidental wavelength variation of 30 Å were attained.
Publication Year: 1995
Publication Date: 1995-06-08
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 32
AI Researcher Chatbot
Get quick answers to your questions about the article from our AI researcher chatbot