Abstract: This chapter contains sections titled: Metals Semiconductors Thin Films for MEMS and Their Deposition Techniques Materials for Polymer MEMS Bulk Micromachining for Silicon-based MEMS Silicon Surface Micromachining Microstereolithography for Polymer MEMS Conclusions References
Publication Year: 2002
Publication Date: 2002-10-25
Language: en
Type: other
Indexed In: ['crossref']
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