Title: Self-neutralized ion implantation into insulators
Abstract: We have carried out some ion implantation experiments into conducting and insulating substrates with a metal ion beam produced by a vacuum arc ion source. We show that the broad ion beam produced by this implanter configuration is space-charge neutralized to a high degree, allowing ion implantation of insulating materials without complication due to charge build-up. The implantation is in effect self-neutralized, with the ion beam carrying along its own cold electron flood.
Publication Year: 1997
Publication Date: 1997-10-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 12
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