Title: High-resolution ion beam profiler for ion implanters
Abstract: A novel ion beam profiler has been developed for measuring a two-dimensional current distribution of an ion beam. The system consists of two parallel disks rotating at different speeds and mounted in front of a single Faraday cup. The cup intercepts the beam current transmitted through a small movable aperture, formed by the intersection of precise spiral slits positioned on the two disks. As the disks rotate, the intersection of the slits describes a sequence of radial lines across an ion beam. Consequently, a set of beam current profiles, each along a different radial line, is obtained at the output of the Faraday cup. Since only unidirectional rotary motion is employed for beam scanning, the data acquisition process is fast and no conductive disk cooling is needed for cyclical operation of the profiler. Preliminary tests have shown that the radial resolution of the system is better than 1 mm for beam images of 60 mm × 60 mm.
Publication Year: 1995
Publication Date: 1995-05-01
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
AI Researcher Chatbot
Get quick answers to your questions about the article from our AI researcher chatbot