Title: Study on Examination of Ion Beam Density of Ion Beam Figuring Machine Based on Faraday Cup
Abstract: The ion beam density of ion beam figuring(IBF) machine was examined based on the self-developed Faraday cup. The feasibility and effectiveness of Faraday cup on ion beam density examination were proved by comparison between the experiment of beam density examination and removal function experiment.A preliminary study on the relationship between beam density and ion beam electric current was made by using Faraday cup and a linear relationship was found between them.The application of Faraday cup can provide important parameter of the ion beam position and beam density state for the ion beam figuring.
Publication Year: 2013
Publication Date: 2013-01-01
Language: en
Type: article
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Cited By Count: 1
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