Title: Dynamic Characteristics of the Micro-Fluidic Systems Actuated by Thermopneumatic-Method
Abstract:We investigated the dynamic characteristics of microfluidic systems under various operating conditions for micropump and microvalve. The pumping rates of the micropump are dependent on a frequency, a ...We investigated the dynamic characteristics of microfluidic systems under various operating conditions for micropump and microvalve. The pumping rates of the micropump are dependent on a frequency, a duty ratio of applied voltage, a poly(dimethylsiloxane) (PDMS) membrane thickness, and a channel depth. The maximum pumping rate of 64 nl/min was obtained at the applied frequency of 5 Hz and duty ratio of 4% for a PDMS membrane thickness of 450 µm and a channel depth of 100 µm. The flow rates of the microvalve with a 300 µm PDMS membrane thickness are measured as a function of an applied power. The flow rate is easily controlled by the on/off alternation with the applied power of 400 mW. The in-channel structured PDMS micropump and microvalve are fabricated with the same fabrication procedure on the same substrate.Read More
Publication Year: 2006
Publication Date: 2006-01-01
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 12
AI Researcher Chatbot
Get quick answers to your questions about the article from our AI researcher chatbot