Title: Large‐Area Three‐Dimensional Structuring by Electrochemical Etching and Lithography
Abstract: Advanced MaterialsVolume 16, Issue 23-24 p. 2166-2170 Communication Large-Area Three-Dimensional Structuring by Electrochemical Etching and Lithography † S. Matthias, S. Matthias Max Planck Institute of Microstructure Physics, Weinberg 2, D-06120 Halle, GermanySearch for more papers by this authorF. Müller, F. Müller [email protected] Search for more papers by this authorC. Jamois, C. Jamois Max Planck Institute of Microstructure Physics, Weinberg 2, D-06120 Halle, GermanySearch for more papers by this authorR. B. Wehrspohn, R. B. Wehrspohn Max Planck Institute of Microstructure Physics, Weinberg 2, D-06120 Halle, Germany Department of Physics, University Paderborn, Warburger Str. 100, D-33098 Paderborn, GermanySearch for more papers by this authorU. Gösele, U. Gösele Max Planck Institute of Microstructure Physics, Weinberg 2, D-06120 Halle, GermanySearch for more papers by this author S. Matthias, S. Matthias Max Planck Institute of Microstructure Physics, Weinberg 2, D-06120 Halle, GermanySearch for more papers by this authorF. Müller, F. Müller [email protected] Search for more papers by this authorC. Jamois, C. Jamois Max Planck Institute of Microstructure Physics, Weinberg 2, D-06120 Halle, GermanySearch for more papers by this authorR. B. Wehrspohn, R. B. Wehrspohn Max Planck Institute of Microstructure Physics, Weinberg 2, D-06120 Halle, Germany Department of Physics, University Paderborn, Warburger Str. 100, D-33098 Paderborn, GermanySearch for more papers by this authorU. Gösele, U. Gösele Max Planck Institute of Microstructure Physics, Weinberg 2, D-06120 Halle, GermanySearch for more papers by this author First published: 26 October 2004 https://doi.org/10.1002/adma.200400436Citations: 113 † The authors thank Dr. Jörg Schilling and Dr. Stefan Schweizer for helpful discussions on mask design and the etching process and Dr. Volker Lehmann for supplying pre-patterned silicon wafers. Stefan Richter is acknowledged for assistance with the FTIR measurements as well as Mrs. Sklarek for assistance in chemical lab. This project was partially funded via the DFG project WE 2637/3. 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