Title: High-Precision Quadrupole Correction Lens for Ion-Beam Focusing: Design and Test of Multistage Self-Aligned Quadrupole Correction-Lens System
Abstract:A multistage self-aligned quadrupole correction lens, which consists of two lens casings, is developed. Each lens-casing cylinder consists of three quadrupole and two aperture electrodes. All lens com...A multistage self-aligned quadrupole correction lens, which consists of two lens casings, is developed. Each lens-casing cylinder consists of three quadrupole and two aperture electrodes. All lens components in lens-casing cylinders are fabricated to achieve an electrode alignment accuracy better than 1 µm. Azimuth errors between entrance and exit lens-casing cylinders can be corrected using the rotary flange fastened to the entrance lens-casing cylinder. The correction-lens system is installed as the probe-forming objective lens in place of the rotationally symmetrical objective lens of the focused ion-beam system. Simulation results show that a four-stage quadrupole correction lens is useful as a correctable probe-forming objective lens because all aperture aberration coefficients can be effectively corrected under the condition of relatively low chromatic aberration. Probe-forming properties and beam shape affected by aperture aberrations of the four-stage quadrupole correction-lens system are observed by scanning ion microscope images.Read More
Publication Year: 2012
Publication Date: 2012-02-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 1
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