Title: Monte Carlo model of electron elastic scattering in solids
Abstract: An analog Monte Carlo model is presented simulating electron elastic scattering in solids and capable to treat problems of quantitative AES and XPS. Its analytical and numerical verification is described. The model is used to investigate the dependence of the elastic reflection coefficient on the inelastic mfp. It was found that the slope decreases with increasing inelastic mfp. The single elastic scattering coefficient is shown to be proportional to the total, not to the inelastic, mean free path. An analytical expression of the single elastic scattering coefficient is derived and supported by Monte Carlo calculations.
Publication Year: 1996
Publication Date: 1996-05-01
Language: en
Type: article
Indexed In: ['crossref']
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