Title: Physical Vapor Deposition Techniques II: Ion Plating, Arc Deposition and Ion Beam Deposition
Abstract: Ion plating, arc deposition and ion beam deposition are physical vapor deposition (PVD) processes for the production of nitride, carbide and oxide coatings. The application fields of these coatings are wear protection, decoration and optical interference coatings. Common features of these processes are the incorporation of reactive gas ions into the growing film and ion bombardment of the substrates before and during deposition. Ion impact facilitates process temperatures inferior to those in comparable chemical vapor deposition (CUD) processes, and ion bombarded coatings have higher adhesion strength, higher density and apparently higher elasticity than coatings prepared without ion bombardment.
Publication Year: 1992
Publication Date: 1992-01-01
Language: en
Type: book-chapter
Indexed In: ['crossref']
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Cited By Count: 2
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