Title: The Deposition of Multicomponent Phases by Ion Plating
Abstract: Some preliminary results obtained using electron beam evaporation of multicomponent phases are presented. The combination of ion plating and the use of a rod-fed electron beam source allows coatings to be made with both alloy and compound materials on substrates which have been very difficult in the past. The results include both metallic and nonmetallic coatings on dielectric substrates.
Publication Year: 1972
Publication Date: 1972-11-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 9
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