Title: Chemical vapor deposition of zirconium carbide alloyed isotropic carbon in a fluidized bed
Abstract: Experiments have been performed to determine the effects of gas composition and temperature on the deposition rate and coat composition of ZrC alloyed carbon coats. The coating was deposited on a mixture of carbon and ThO/sub 2/ spheres in a fluidized bed using a gas mixture of C/sub 3/H/sub 6/, H/sub 2/, ZrCl/sub 4/, Ar and He. Increases in temperature increased the deposition rate in the normal exponential fashion. An increase in the concentration of H/sub 2/ tended to retard the deposition rate of C while increasing that of ZrC and the converse was found for C/sub 3/H/sub 6/ concentration. The coat composition was found to vary linearly with the ratio of H/sub 2//C/sub 3/H/sub 6/ and to be independent of temperature.
Publication Year: 1977
Publication Date: 1977-01-01
Language: en
Type: article
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