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{'id': 'https://openalex.org/W4327718595', 'doi': 'https://doi.org/10.1016/j.heliyon.2023.e14643', 'title': 'Low-energy Ar+ ion-beam-induced chemical vapor deposition of silicon dioxide films using tetraethyl orthosilicate', 'display_name': 'Low-energy Ar+ ion-beam-induced chemical vapor deposition of silicon dioxide films using tetraethyl orthosilicate', 'publication_year': 2023, 'publication_date': '2023-03-17', 'ids': {'openalex': 'https://openalex.org/W4327718595', 'doi': 'https://doi.org/10.1016/j.heliyon.2023.e14643', 'pmid': 'https://pubmed.ncbi.nlm.nih.gov/37035367'}, 'language': 'en', 'primary_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.1016/j.heliyon.2023.e14643', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S2898612692', 'display_name': 'Heliyon', 'issn_l': '2405-8440', 'issn': ['2405-8440'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320990', 'host_organization_name': 'Elsevier BV', 'host_organization_lineage': ['https://openalex.org/P4310320990'], 'host_organization_lineage_names': ['Elsevier BV'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref', 'pubmed'], 'open_access': {'is_oa': True, 'oa_status': 'gold', 'oa_url': 'https://doi.org/10.1016/j.heliyon.2023.e14643', 'any_repository_has_fulltext': True}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5012033210', 'display_name': 'Satoru Yoshimura', 'orcid': 'https://orcid.org/0000-0003-0614-6433'}, 'institutions': [{'id': 'https://openalex.org/I98285908', 'display_name': 'Osaka University', 'ror': 'https://ror.org/035t8zc32', 'country_code': 'JP', 'type': 'education', 'lineage': ['https://openalex.org/I98285908']}], 'countries': ['JP'], 'is_corresponding': False, 'raw_author_name': 'Satoru Yoshimura', 'raw_affiliation_strings': ['Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan.'], 'affiliations': [{'raw_affiliation_string': 'Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan.', 'institution_ids': ['https://openalex.org/I98285908']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5037328536', 'display_name': 'Satoshi Sugimoto', 'orcid': 'https://orcid.org/0000-0003-0401-0030'}, 'institutions': [{'id': 'https://openalex.org/I98285908', 'display_name': 'Osaka University', 'ror': 'https://ror.org/035t8zc32', 'country_code': 'JP', 'type': 'education', 'lineage': ['https://openalex.org/I98285908']}], 'countries': ['JP'], 'is_corresponding': False, 'raw_author_name': 'Satoshi Sugimoto', 'raw_affiliation_strings': ['Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan.'], 'affiliations': [{'raw_affiliation_string': 'Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan.', 'institution_ids': ['https://openalex.org/I98285908']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5041275701', 'display_name': 'Takae Takeuchi', 'orcid': 'https://orcid.org/0000-0001-9523-3701'}, 'institutions': [{'id': 'https://openalex.org/I98885092', 'display_name': "Nara Women's University", 'ror': 'https://ror.org/05kzadn81', 'country_code': 'JP', 'type': 'education', 'lineage': ['https://openalex.org/I98885092']}], 'countries': ['JP'], 'is_corresponding': False, 'raw_author_name': 'Takae Takeuchi', 'raw_affiliation_strings': ["Department of Chemistry, Biology and Environmental Science, Faculty of Science, Nara Women's University, Nara, Nara, 630-8506, Japan."], 'affiliations': [{'raw_affiliation_string': "Department of Chemistry, Biology and Environmental Science, Faculty of Science, Nara Women's University, Nara, Nara, 630-8506, Japan.", 'institution_ids': ['https://openalex.org/I98885092']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5078213650', 'display_name': 'Masato Kiuchi', 'orcid': 'https://orcid.org/0000-0002-6365-3952'}, 'institutions': [{'id': 'https://openalex.org/I98285908', 'display_name': 'Osaka University', 'ror': 'https://ror.org/035t8zc32', 'country_code': 'JP', 'type': 'education', 'lineage': ['https://openalex.org/I98285908']}], 'countries': ['JP'], 'is_corresponding': False, 'raw_author_name': 'Masato Kiuchi', 'raw_affiliation_strings': ['Cerast Laboratory, Setagaya, Tokyo, 154-0011, Japan.', 'Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan.'], 'affiliations': [{'raw_affiliation_string': 'Cerast Laboratory, Setagaya, Tokyo, 154-0011, Japan.', 'institution_ids': []}, {'raw_affiliation_string': 'Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan.', 'institution_ids': ['https://openalex.org/I98285908']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 2, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': {'value': 1750, 'currency': 'USD', 'value_usd': 1750, 'provenance': 'doaj'}, 'apc_paid': {'value': 1750, 'currency': 'USD', 'value_usd': 1750, 'provenance': 'doaj'}, 'fwci': 1.66, 'has_fulltext': False, 'cited_by_count': 4, 'citation_normalized_percentile': {'value': 0.999909, 'is_in_top_1_percent': True, 'is_in_top_10_percent': True}, 'cited_by_percentile_year': {'min': 90, 'max': 92}, 'biblio': {'volume': '9', 'issue': '4', 'first_page': 'e14643', 'last_page': 'e14643'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T12166', 'display_name': 'Ion Beam Surface Analysis and Nanoscale Patterning', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2206', 'display_name': 'Computational Mechanics'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T12166', 'display_name': 'Ion Beam Surface Analysis and Nanoscale Patterning', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2206', 'display_name': 'Computational Mechanics'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10472', 'display_name': 'Atomic Layer Deposition Technology', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10623', 'display_name': 'Plasmonics for Photovoltaic Devices', 'score': 0.9996, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/silicon-dioxide', 'display_name': 'Silicon dioxide', 'score': 0.8094109}, {'id': 'https://openalex.org/keywords/thin-film-growth', 'display_name': 'Thin Film Growth', 'score': 0.497832}, {'id': 'https://openalex.org/keywords/deposition', 'display_name': 'Deposition (geology)', 'score': 0.47999924}, {'id': 'https://openalex.org/keywords/orthosilicate', 'display_name': 'Orthosilicate', 'score': 0.4352373}], 'concepts': [{'id': 'https://openalex.org/C2777432599', 'wikidata': 'https://www.wikidata.org/wiki/Q421458', 'display_name': 'Tetraethyl orthosilicate', 'level': 2, 'score': 0.97262454}, {'id': 'https://openalex.org/C2779089622', 'wikidata': 'https://www.wikidata.org/wiki/Q116269', 'display_name': 'Silicon dioxide', 'level': 2, 'score': 0.8094109}, {'id': 'https://openalex.org/C2777289219', 'wikidata': 'https://www.wikidata.org/wiki/Q7632154', 'display_name': 'Substrate (aquarium)', 'level': 2, 'score': 0.70233214}, {'id': 'https://openalex.org/C175708663', 'wikidata': 'https://www.wikidata.org/wiki/Q899559', 'display_name': 'X-ray photoelectron spectroscopy', 'level': 2, 'score': 0.65263176}, {'id': 'https://openalex.org/C544956773', 'wikidata': 'https://www.wikidata.org/wiki/Q670', 'display_name': 'Silicon', 'level': 2, 'score': 0.64206123}, {'id': 'https://openalex.org/C160892712', 'wikidata': 'https://www.wikidata.org/wiki/Q901559', 'display_name': 'Fourier transform infrared spectroscopy', 'level': 2, 'score': 0.59958476}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.5603196}, {'id': 'https://openalex.org/C50774322', 'wikidata': 'https://www.wikidata.org/wiki/Q644248', 'display_name': 'Ion beam', 'level': 3, 'score': 0.53227675}, {'id': 'https://openalex.org/C19067145', 'wikidata': 'https://www.wikidata.org/wiki/Q1137203', 'display_name': 'Thin film', 'level': 2, 'score': 0.4970632}, {'id': 'https://openalex.org/C64297162', 'wikidata': 'https://www.wikidata.org/wiki/Q1987070', 'display_name': 'Deposition (geology)', 'level': 3, 'score': 0.47999924}, {'id': 'https://openalex.org/C113196181', 'wikidata': 'https://www.wikidata.org/wiki/Q485223', 'display_name': 'Analytical Chemistry (journal)', 'level': 2, 'score': 0.4724446}, {'id': 'https://openalex.org/C145148216', 'wikidata': 'https://www.wikidata.org/wiki/Q36496', 'display_name': 'Ion', 'level': 2, 'score': 0.43870628}, {'id': 'https://openalex.org/C2779801337', 'wikidata': 'https://www.wikidata.org/wiki/Q21206420', 'display_name': 'Orthosilicate', 'level': 3, 'score': 0.4352373}, {'id': 'https://openalex.org/C42360764', 'wikidata': 'https://www.wikidata.org/wiki/Q83588', 'display_name': 'Chemical engineering', 'level': 1, 'score': 0.26243812}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.25843912}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.17814544}, {'id': 'https://openalex.org/C49040817', 'wikidata': 'https://www.wikidata.org/wiki/Q193091', 'display_name': 'Optoelectronics', 'level': 1, 'score': 0.09954026}, {'id': 'https://openalex.org/C178790620', 'wikidata': 'https://www.wikidata.org/wiki/Q11351', 'display_name': 'Organic chemistry', 'level': 1, 'score': 0.07528409}, {'id': 'https://openalex.org/C159985019', 'wikidata': 'https://www.wikidata.org/wiki/Q181790', 'display_name': 'Composite material', 'level': 1, 'score': 0.058894247}, {'id': 'https://openalex.org/C151730666', 'wikidata': 'https://www.wikidata.org/wiki/Q7205', 'display_name': 'Paleontology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C2816523', 'wikidata': 'https://www.wikidata.org/wiki/Q180184', 'display_name': 'Sediment', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C127413603', 'wikidata': 'https://www.wikidata.org/wiki/Q11023', 'display_name': 'Engineering', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C127313418', 'wikidata': 'https://www.wikidata.org/wiki/Q1069', 'display_name': 'Geology', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C111368507', 'wikidata': 'https://www.wikidata.org/wiki/Q43518', 'display_name': 'Oceanography', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C86803240', 'wikidata': 'https://www.wikidata.org/wiki/Q420', 'display_name': 'Biology', 'level': 0, 'score': 0.0}], 'mesh': [], 'locations_count': 3, 'locations': [{'is_oa': True, 'landing_page_url': 'https://doi.org/10.1016/j.heliyon.2023.e14643', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S2898612692', 'display_name': 'Heliyon', 'issn_l': '2405-8440', 'issn': ['2405-8440'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320990', 'host_organization_name': 'Elsevier BV', 'host_organization_lineage': ['https://openalex.org/P4310320990'], 'host_organization_lineage_names': ['Elsevier BV'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, {'is_oa': True, 'landing_page_url': 'https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10073759', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S2764455111', 'display_name': 'PubMed Central', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I1299303238', 'host_organization_name': 'National Institutes of Health', 'host_organization_lineage': ['https://openalex.org/I1299303238'], 'host_organization_lineage_names': ['National Institutes of Health'], 'type': 'repository'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, {'is_oa': False, 'landing_page_url': 'https://pubmed.ncbi.nlm.nih.gov/37035367', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S4306525036', 'display_name': 'PubMed', 'issn_l': None, 'issn': None, 'is_oa': False, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I1299303238', 'host_organization_name': 'National Institutes of Health', 'host_organization_lineage': ['https://openalex.org/I1299303238'], 'host_organization_lineage_names': ['National Institutes of Health'], 'type': 'repository'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.1016/j.heliyon.2023.e14643', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S2898612692', 'display_name': 'Heliyon', 'issn_l': '2405-8440', 'issn': ['2405-8440'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320990', 'host_organization_name': 'Elsevier BV', 'host_organization_lineage': ['https://openalex.org/P4310320990'], 'host_organization_lineage_names': ['Elsevier BV'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'sustainable_development_goals': [{'score': 0.55, 'display_name': 'Affordable and clean energy', 'id': 'https://metadata.un.org/sdg/7'}], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 38, 'referenced_works': ['https://openalex.org/W1480160699', 'https://openalex.org/W1980296914', 'https://openalex.org/W1980412805', 'https://openalex.org/W1986421886', 'https://openalex.org/W1994856295', 'https://openalex.org/W1999310118', 'https://openalex.org/W2003147326', 'https://openalex.org/W2005933752', 'https://openalex.org/W2013883474', 'https://openalex.org/W2016983766', 'https://openalex.org/W2023023177', 'https://openalex.org/W2029637859', 'https://openalex.org/W2037580705', 'https://openalex.org/W2049426344', 'https://openalex.org/W2052447367', 'https://openalex.org/W2054200750', 'https://openalex.org/W2056182350', 'https://openalex.org/W2060221640', 'https://openalex.org/W2068426051', 'https://openalex.org/W2068838307', 'https://openalex.org/W2078764683', 'https://openalex.org/W2080623877', 'https://openalex.org/W2082564104', 'https://openalex.org/W2083149887', 'https://openalex.org/W2085233441', 'https://openalex.org/W2098130488', 'https://openalex.org/W2110200822', 'https://openalex.org/W2294309947', 'https://openalex.org/W2584626699', 'https://openalex.org/W2796157528', 'https://openalex.org/W3112446721', 'https://openalex.org/W3173777367', 'https://openalex.org/W3208658109', 'https://openalex.org/W3210867789', 'https://openalex.org/W4200230714', 'https://openalex.org/W4200542534', 'https://openalex.org/W4292258941', 'https://openalex.org/W4296885697'], 'related_works': ['https://openalex.org/W4245642133', 'https://openalex.org/W4240213659', 'https://openalex.org/W2985197699', 'https://openalex.org/W2893503465', 'https://openalex.org/W2565890457', 'https://openalex.org/W2463665751', 'https://openalex.org/W2274639860', 'https://openalex.org/W2165123087', 'https://openalex.org/W2021945363', 'https://openalex.org/W2005910385'], 'abstract_inverted_index': {'This': [0], 'study': [1], 'was': [2, 33, 63, 69], 'conducted': [3], 'to': [4, 17, 22], 'determine': [5], 'whether': [6], 'the': [7, 27, 37, 45, 48, 51, 66, 76, 87], 'simultaneous': [8], 'injections': [9], 'of': [10, 50, 89], 'Ar+': [11, 30, 78], 'ions': [12], 'and': [13, 57], 'tetraethyl': [14], 'orthosilicate': [15], '(TEOS)': [16], 'a': [18, 24, 41], 'substrate': [19], 'are': [20], 'able': [21], 'fabricate': [23], 'film': [25, 42, 52, 68], 'on': [26, 44], 'substrate.': [28, 46], 'The': [29], 'ion': [31], 'energy': [32], '100': [34], 'eV.': [35], 'After': [36], 'injections,': [38], 'we': [39], 'found': [40, 64], 'deposited': [43, 67], 'Following': [47], 'analyses': [49], 'with': [53], 'X-ray': [54], 'photoelectron': [55], 'spectroscopy': [56], 'Fourier': [58], 'transform': [59], 'infrared': [60], 'spectroscopy,': [61], 'it': [62], 'that': [65, 75], 'silicon': [70], 'dioxide': [71], '(SiO2).': [72], 'We': [73], 'conclude': [74], 'low-energy': [77], 'ion-beam-induced': [79], 'deposition': [80], 'method': [81], 'using': [82], 'TEOS': [83], 'is': [84], 'useful': [85], 'for': [86], 'growth': [88], 'SiO2': [90], 'films.': [91]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W4327718595', 'counts_by_year': [{'year': 2024, 'cited_by_count': 1}, {'year': 2023, 'cited_by_count': 2}], 'updated_date': '2024-09-18T06:30:00.474697', 'created_date': '2023-03-18'}