Title: FABRICATION OF CONCAVE AND CONVEX MICRO-OPTICAL ELEMENTS WITH POLYMER FOR FREE-SPACE MICRO-OPTICAL BENCH
Abstract: International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 443-446 (2003) Optical MEMSNo AccessFABRICATION OF CONCAVE AND CONVEX MICRO-OPTICAL ELEMENTS WITH POLYMER FOR FREE-SPACE MICRO-OPTICAL BENCHFRANCK CHOLLET, CHUN HONG LOW, SOK KIM LEE and CHUN YANGFRANCK CHOLLETMicroMachines Centre, School of MPE, Nanyang Technological University, 50 Nanyang avenue, 639798, Singapore Search for more papers by this author , CHUN HONG LOWMicroMachines Centre, School of MPE, Nanyang Technological University, 50 Nanyang avenue, 639798, Singapore Search for more papers by this author , SOK KIM LEEMicroMachines Centre, School of MPE, Nanyang Technological University, 50 Nanyang avenue, 639798, Singapore Search for more papers by this author and CHUN YANGMicroMachines Centre, School of MPE, Nanyang Technological University, 50 Nanyang avenue, 639798, Singapore Search for more papers by this author https://doi.org/10.1142/S1465876303001484Cited by:3 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractThe development of micro-optical bench (MOB) technology as so far been limited by its reliance on polysilicon based elements which does not have good optical properties, and does not easily yield the spherical surfaces needed for refracting lenses. Polymers have shown large improvement in the recent years and could be a solution to hasten the development of MOB. We report here on the fabrication using polymers of converging and diverging refracting lens, with diameter ranging between 60 μm and 500 μm and with focal length as small as 100 μm. The polymer investigated where a photosensible cresol novolak (AZ9260), a photosensible epoxy resin (SU8) and a silicone (PDMS). In addition we have developed a phenomenological model and a physical model that elucidate the relationship between the fabrication parameters and the characteristics of the optical elements.Keywords:Optical MEMSmicro-lensSU8micro-moldingdiverging lens References L. Y. Linet al., Electronics Letters 30, 448 (1994). Crossref, Google ScholarL. Y. in, E. L. Goldstein and R. W. Tkach, IEEE J. of Selected Topics in Quantum Electronics 5, 4 (1999). Google ScholarC. R. King, L. Y. Lin and M. C. Wu, IEEE Photonics Technology Letter 8, 1349 (1996). Crossref, Google ScholarT. Bourouina, T. Masuzawa and H. Fujita, IEEE/LEOS Optical MEMS 2001 (2001) pp. 25–28. Google ScholarD. Dalyet al., Meas. Sci. Technology 1, 759 (1990). Crossref, Google Scholar FiguresReferencesRelatedDetailsCited By 3Photonic crystal composites-based wide-band optical collimatorJinjie Shi, Bala Krishna Juluri, Sz-Chin Steven Lin, Mengqian Lu and Tieyu Gao et al.15 Aug 2010 | Journal of Applied Physics, Vol. 108, No. 4Simultaneous measurement of focal length and index of refraction of a microlens using a compound microscopeFranck Chollet and Mohammed Ashraf14 September 2009 | Journal of Micromechanics and Microengineering, Vol. 19, No. 10Silicon microneedle array with biodegradable tips for transdermal drug deliveryBangtao Chen, Jiashen Wei, Francis E. H. Tay, Yee Ting Wong and Ciprian Iliescu8 January 2008 | Microsystem Technologies, Vol. 14, No. 7 Recommended Vol. 04, No. 03 Metrics History KeywordsOptical MEMSmicro-lensSU8micro-moldingdiverging lensPDF download
Publication Year: 2003
Publication Date: 2003-09-01
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 3
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