Title: Fabrication of Ferroelectric Microstructures by Electron-Beam-Induced Patterning Process
Abstract:Abstract 300 nm to 20 μm-sized circular dots of SrBi2Ta2O9 (SBT), lead-free ferroelectric materials, were fabricated by an electron-beam-induced micropatterning process using a scanning electron micro...Abstract 300 nm to 20 μm-sized circular dots of SrBi2Ta2O9 (SBT), lead-free ferroelectric materials, were fabricated by an electron-beam-induced micropatterning process using a scanning electron microscope (SEM)-based electron beam lithography system. The obtained micro dots were characterized using optical microscopy and atomic force microscopy. We also succeeded in fabrication of 2 to 20 μm diameter Ir/SBT/Ir circular capacitors employing a lift-off technique in the electron-beam-induced patterning process. Those circular capacitors showed piezoelectric response. Keywords: Lead-free ferroelectric materialelectron-beam-induced reaction processmicrostructurespiezoelectric property Acknowledgments The authors would like to thank Dr. Hironori Fujisawa and Mr. Yoshihiro Seio (University of Hyogo) for AFM and PFM measurements. They also would like to thank Dr. Yuichi Sakai (Toyama Industrial Technology Center) for performing XRD measurements.Read More
Publication Year: 2010
Publication Date: 2010-10-29
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 2
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