Title: Influence of the ion bombardment on the stress in thin films produced by ion beam and RF sputtering techniques S. Scaglione, F Sarto, A. Rizzo, M. Alvisi and M. A . Tagliente
Publication Year: 2014
Publication Date: 2014-07-30
Language: en
Type: book-chapter
Indexed In: ['crossref']
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Title: $Influence of the ion bombardment on the stress in thin films produced by ion beam and RF sputtering techniques S. Scaglione, F Sarto, A. Rizzo, M. Alvisi and M. A . Tagliente