Title: Strategies for achieving sub-nanometre depth resolution in secondary ion mass spectrometry (SIMS)
Abstract: The factors that limit the depth resolution in SIMS are discussed and experimental strategies for overcoming these limitations and achieving sub-nanometre depth resolution explored. Beam induced mixing processes are shown to be the main limitation to sub-nanometre depth resolution in some materials whereas surface and beam induced topography dominate in others. The development of a new generation of low energy ion beams and of novel analysis strategies such as the ‘bevel-and-linescan’ approach and the imaging of focused-ion-beam (FIB) milled cross-sections are described.
Publication Year: 2022
Publication Date: 2022-01-05
Language: en
Type: book-chapter
Indexed In: ['crossref']
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