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{'id': 'https://openalex.org/W3197419717', 'doi': 'https://doi.org/10.3390/ma14175036', 'title': 'Characterization of SiO2 Etching Profiles in Pulse-Modulated Capacitively Coupled Plasmas', 'display_name': 'Characterization of SiO2 Etching Profiles in Pulse-Modulated Capacitively Coupled Plasmas', 'publication_year': 2021, 'publication_date': '2021-09-03', 'ids': {'openalex': 'https://openalex.org/W3197419717', 'doi': 'https://doi.org/10.3390/ma14175036', 'mag': '3197419717', 'pmid': 'https://pubmed.ncbi.nlm.nih.gov/34501123', 'pmcid': 'https://www.ncbi.nlm.nih.gov/pmc/articles/8434144'}, 'language': 'en', 'primary_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.3390/ma14175036', 'pdf_url': 'https://www.mdpi.com/1996-1944/14/17/5036/pdf?version=1630659925', 'source': {'id': 'https://openalex.org/S18714766', 'display_name': 'Materials', 'issn_l': '1996-1944', 'issn': ['1996-1944'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310310987', 'host_organization_name': 'Multidisciplinary Digital Publishing Institute', 'host_organization_lineage': ['https://openalex.org/P4310310987'], 'host_organization_lineage_names': ['Multidisciplinary Digital Publishing Institute'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': True, 'oa_status': 'gold', 'oa_url': 'https://www.mdpi.com/1996-1944/14/17/5036/pdf?version=1630659925', 'any_repository_has_fulltext': True}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5010547953', 'display_name': 'Chul‐Hee Cho', 'orcid': 'https://orcid.org/0000-0002-6781-1057'}, 'institutions': [{'id': 'https://openalex.org/I196345858', 'display_name': 'Chungnam National University', 'ror': 'https://ror.org/0227as991', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I196345858']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'Chulhee Cho', 'raw_affiliation_strings': ['Department of Physics, Chungnam National University, 99 Daehak-ro, Daejeon 34134, Korea'], 'affiliations': [{'raw_affiliation_string': 'Department of Physics, Chungnam National University, 99 Daehak-ro, Daejeon 34134, Korea', 'institution_ids': ['https://openalex.org/I196345858']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5012520997', 'display_name': 'Kok Yeow You', 'orcid': 'https://orcid.org/0000-0001-5214-7571'}, 'institutions': [{'id': 'https://openalex.org/I196345858', 'display_name': 'Chungnam National University', 'ror': 'https://ror.org/0227as991', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I196345858']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'Kwangho You', 'raw_affiliation_strings': ['Department of Physics, Chungnam National University, 99 Daehak-ro, Daejeon 34134, Korea'], 'affiliations': [{'raw_affiliation_string': 'Department of Physics, Chungnam National University, 99 Daehak-ro, Daejeon 34134, Korea', 'institution_ids': ['https://openalex.org/I196345858']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5031429458', 'display_name': 'Sijun Kim', 'orcid': 'https://orcid.org/0000-0001-7782-7194'}, 'institutions': [], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'Sijun Kim', 'raw_affiliation_strings': ['Nanotech, Yongin 28431, Korea'], 'affiliations': [{'raw_affiliation_string': 'Nanotech, Yongin 28431, Korea', 'institution_ids': []}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5012676193', 'display_name': 'Youngseok Lee', 'orcid': 'https://orcid.org/0000-0003-0900-166X'}, 'institutions': [{'id': 'https://openalex.org/I196345858', 'display_name': 'Chungnam National University', 'ror': 'https://ror.org/0227as991', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I196345858']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'Youngseok Lee', 'raw_affiliation_strings': ['Department of Physics, Chungnam National University, 99 Daehak-ro, Daejeon 34134, Korea'], 'affiliations': [{'raw_affiliation_string': 'Department of Physics, Chungnam National University, 99 Daehak-ro, Daejeon 34134, Korea', 'institution_ids': ['https://openalex.org/I196345858']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5087635416', 'display_name': 'Jangjae Lee', 'orcid': 'https://orcid.org/0000-0002-0298-5638'}, 'institutions': [{'id': 'https://openalex.org/I196345858', 'display_name': 'Chungnam National University', 'ror': 'https://ror.org/0227as991', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I196345858']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'Jangjae Lee', 'raw_affiliation_strings': ['Department of Physics, Chungnam National University, 99 Daehak-ro, Daejeon 34134, Korea'], 'affiliations': [{'raw_affiliation_string': 'Department of Physics, Chungnam National University, 99 Daehak-ro, Daejeon 34134, Korea', 'institution_ids': ['https://openalex.org/I196345858']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5023354559', 'display_name': 'S. J. You', 'orcid': 'https://orcid.org/0000-0002-8306-7643'}, 'institutions': [{'id': 'https://openalex.org/I196345858', 'display_name': 'Chungnam National University', 'ror': 'https://ror.org/0227as991', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I196345858']}], 'countries': ['KR'], 'is_corresponding': True, 'raw_author_name': 'Shinjae You', 'raw_affiliation_strings': ['Department of Physics, Chungnam National University, 99 Daehak-ro, Daejeon 34134, Korea', 'Institute of Quantum System (IQS), Chungnam National University, Daejeon 34134, Korea'], 'affiliations': [{'raw_affiliation_string': 'Department of Physics, Chungnam National University, 99 Daehak-ro, Daejeon 34134, Korea', 'institution_ids': ['https://openalex.org/I196345858']}, {'raw_affiliation_string': 'Institute of Quantum System (IQS), Chungnam National University, Daejeon 34134, Korea', 'institution_ids': ['https://openalex.org/I196345858']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 1, 'corresponding_author_ids': ['https://openalex.org/A5023354559'], 'corresponding_institution_ids': ['https://openalex.org/I196345858'], 'apc_list': {'value': 2300, 'currency': 'CHF', 'value_usd': 2490, 'provenance': 'doaj'}, 'apc_paid': {'value': 2300, 'currency': 'CHF', 'value_usd': 2490, 'provenance': 'doaj'}, 'fwci': 2.629, 'has_fulltext': False, 'cited_by_count': 32, 'citation_normalized_percentile': {'value': 0.672342, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 96, 'max': 97}, 'biblio': {'volume': '14', 'issue': '17', 'first_page': '5036', 'last_page': '5036'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T10781', 'display_name': 'Plasma Diagnostics and Applications', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T10781', 'display_name': 'Plasma Diagnostics and Applications', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10377', 'display_name': 'Metal and Thin Film Mechanics', 'score': 0.9993, 'subfield': {'id': 'https://openalex.org/subfields/2211', 'display_name': 'Mechanics of Materials'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10472', 'display_name': 'Semiconductor materials and devices', 'score': 0.9974, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/plasma-processing', 'display_name': 'Plasma Processing', 'score': 0.75405556}, {'id': 'https://openalex.org/keywords/plasma-etching', 'display_name': 'Plasma Etching', 'score': 0.7236664}, {'id': 'https://openalex.org/keywords/pulsed-power', 'display_name': 'Pulsed Power', 'score': 0.53064907}, {'id': 'https://openalex.org/keywords/deposition', 'display_name': 'Deposition', 'score': 0.49120802}, {'id': 'https://openalex.org/keywords/dry-etching', 'display_name': 'Dry etching', 'score': 0.47947156}, {'id': 'https://openalex.org/keywords/characterization', 'display_name': 'Characterization', 'score': 0.44143856}], 'concepts': [{'id': 'https://openalex.org/C100460472', 'wikidata': 'https://www.wikidata.org/wiki/Q2368605', 'display_name': 'Etching (microfabrication)', 'level': 3, 'score': 0.8447001}, {'id': 'https://openalex.org/C82706917', 'wikidata': 'https://www.wikidata.org/wiki/Q10251', 'display_name': 'Plasma', 'level': 2, 'score': 0.8035866}, {'id': 'https://openalex.org/C145738678', 'wikidata': 'https://www.wikidata.org/wiki/Q4364316', 'display_name': 'Plasma processing', 'level': 3, 'score': 0.75405556}, {'id': 'https://openalex.org/C107187091', 'wikidata': 'https://www.wikidata.org/wiki/Q2392011', 'display_name': 'Plasma etching', 'level': 4, 'score': 0.7236664}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.66218555}, {'id': 'https://openalex.org/C2780167933', 'wikidata': 'https://www.wikidata.org/wiki/Q1550652', 'display_name': 'Pulse (music)', 'level': 3, 'score': 0.62675107}, {'id': 'https://openalex.org/C97039730', 'wikidata': 'https://www.wikidata.org/wiki/Q552565', 'display_name': 'Pulsed power', 'level': 3, 'score': 0.53064907}, {'id': 'https://openalex.org/C130472188', 'wikidata': 'https://www.wikidata.org/wiki/Q1640159', 'display_name': 'Reactive-ion etching', 'level': 4, 'score': 0.5301959}, {'id': 'https://openalex.org/C49040817', 'wikidata': 'https://www.wikidata.org/wiki/Q193091', 'display_name': 'Optoelectronics', 'level': 1, 'score': 0.5106569}, {'id': 'https://openalex.org/C64297162', 'wikidata': 'https://www.wikidata.org/wiki/Q1987070', 'display_name': 'Deposition (geology)', 'level': 3, 'score': 0.49120802}, {'id': 'https://openalex.org/C1291036', 'wikidata': 'https://www.wikidata.org/wiki/Q1191918', 'display_name': 'Dry etching', 'level': 4, 'score': 0.47947156}, {'id': 'https://openalex.org/C192039680', 'wikidata': 'https://www.wikidata.org/wiki/Q7201785', 'display_name': 'Plasma parameters', 'level': 3, 'score': 0.4638237}, {'id': 'https://openalex.org/C2780841128', 'wikidata': 'https://www.wikidata.org/wiki/Q5073781', 'display_name': 'Characterization (materials science)', 'level': 2, 'score': 0.44143856}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.37667486}, {'id': 'https://openalex.org/C113196181', 'wikidata': 'https://www.wikidata.org/wiki/Q485223', 'display_name': 'Analytical Chemistry (journal)', 'level': 2, 'score': 0.36726984}, {'id': 'https://openalex.org/C163258240', 'wikidata': 'https://www.wikidata.org/wiki/Q25342', 'display_name': 'Power (physics)', 'level': 2, 'score': 0.2759316}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.2128892}, {'id': 'https://openalex.org/C120665830', 'wikidata': 'https://www.wikidata.org/wiki/Q14620', 'display_name': 'Optics', 'level': 1, 'score': 0.1596705}, {'id': 'https://openalex.org/C121332964', 'wikidata': 'https://www.wikidata.org/wiki/Q413', 'display_name': 'Physics', 'level': 0, 'score': 0.10299468}, {'id': 'https://openalex.org/C94915269', 'wikidata': 'https://www.wikidata.org/wiki/Q1834857', 'display_name': 'Detector', 'level': 2, 'score': 0.070860356}, {'id': 'https://openalex.org/C2779227376', 'wikidata': 'https://www.wikidata.org/wiki/Q6505497', 'display_name': 'Layer (electronics)', 'level': 2, 'score': 0.056201637}, {'id': 'https://openalex.org/C43617362', 'wikidata': 'https://www.wikidata.org/wiki/Q170050', 'display_name': 'Chromatography', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C151730666', 'wikidata': 'https://www.wikidata.org/wiki/Q7205', 'display_name': 'Paleontology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C62520636', 'wikidata': 'https://www.wikidata.org/wiki/Q944', 'display_name': 'Quantum mechanics', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C2816523', 'wikidata': 'https://www.wikidata.org/wiki/Q180184', 'display_name': 'Sediment', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C86803240', 'wikidata': 'https://www.wikidata.org/wiki/Q420', 'display_name': 'Biology', 'level': 0, 'score': 0.0}], 'mesh': [], 'locations_count': 3, 'locations': [{'is_oa': True, 'landing_page_url': 'https://doi.org/10.3390/ma14175036', 'pdf_url': 'https://www.mdpi.com/1996-1944/14/17/5036/pdf?version=1630659925', 'source': {'id': 'https://openalex.org/S18714766', 'display_name': 'Materials', 'issn_l': '1996-1944', 'issn': ['1996-1944'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310310987', 'host_organization_name': 'Multidisciplinary Digital Publishing Institute', 'host_organization_lineage': ['https://openalex.org/P4310310987'], 'host_organization_lineage_names': ['Multidisciplinary Digital Publishing Institute'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, {'is_oa': False, 'landing_page_url': 'https://hal.science/hal-04809143', 'pdf_url': None, 'source': None, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, {'is_oa': True, 'landing_page_url': 'https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8434144', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S2764455111', 'display_name': 'PubMed Central', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I1299303238', 'host_organization_name': 'National Institutes of Health', 'host_organization_lineage': ['https://openalex.org/I1299303238'], 'host_organization_lineage_names': ['National Institutes of Health'], 'type': 'repository'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}], 'best_oa_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.3390/ma14175036', 'pdf_url': 'https://www.mdpi.com/1996-1944/14/17/5036/pdf?version=1630659925', 'source': {'id': 'https://openalex.org/S18714766', 'display_name': 'Materials', 'issn_l': '1996-1944', 'issn': ['1996-1944'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310310987', 'host_organization_name': 'Multidisciplinary Digital Publishing Institute', 'host_organization_lineage': ['https://openalex.org/P4310310987'], 'host_organization_lineage_names': ['Multidisciplinary Digital Publishing Institute'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'sustainable_development_goals': [{'score': 0.54, 'id': 'https://metadata.un.org/sdg/15', 'display_name': 'Life on land'}], 'grants': [{'funder': 'https://openalex.org/F4320322064', 'funder_display_name': 'Korea Institute for Advancement of Technology', 'award_id': 'P0008458'}, {'funder': 'https://openalex.org/F4320322120', 'funder_display_name': 'National Research Foundation of Korea', 'award_id': 'NRF-2020R1A6A1A03047771'}, {'funder': 'https://openalex.org/F4320325370', 'funder_display_name': 'National Research Council of Science and Technology', 'award_id': 'CAP-17-02-NFRI, CRF-20-01-NFRI'}, {'funder': 'https://openalex.org/F4320330746', 'funder_display_name': 'Korea Semiconductor Research Consortium', 'award_id': 'MOTIE(20009818, 20010420)'}, {'funder': 'https://openalex.org/F4320334879', 'funder_display_name': 'Korea Evaluation Institute of Industrial Technology', 'award_id': 'MOTIE'}, {'funder': 'https://openalex.org/F4320335199', 'funder_display_name': 'Korea Institute of Energy Technology Evaluation and Planning', 'award_id': '20202010100020'}], 'datasets': [], 'versions': [], 'referenced_works_count': 32, 'referenced_works': ['https://openalex.org/W106763751', 'https://openalex.org/W1630756323', 'https://openalex.org/W1831315277', 'https://openalex.org/W1975154087', 'https://openalex.org/W1976928165', 'https://openalex.org/W1993530583', 'https://openalex.org/W1996595540', 'https://openalex.org/W1999826237', 'https://openalex.org/W2000698952', 'https://openalex.org/W2010054899', 'https://openalex.org/W2031201399', 'https://openalex.org/W2032218118', 'https://openalex.org/W2036106792', 'https://openalex.org/W2041367560', 'https://openalex.org/W2046836154', 'https://openalex.org/W2048936233', 'https://openalex.org/W2063742019', 'https://openalex.org/W2074778977', 'https://openalex.org/W2080294734', 'https://openalex.org/W2089724599', 'https://openalex.org/W2152122174', 'https://openalex.org/W2156860995', 'https://openalex.org/W2266060667', 'https://openalex.org/W2562655035', 'https://openalex.org/W2735358704', 'https://openalex.org/W2797173825', 'https://openalex.org/W2888763005', 'https://openalex.org/W2938421330', 'https://openalex.org/W3000639623', 'https://openalex.org/W3003503057', 'https://openalex.org/W3140927964', 'https://openalex.org/W3168821805'], 'related_works': ['https://openalex.org/W957747755', 'https://openalex.org/W4291916140', 'https://openalex.org/W3197419717', 'https://openalex.org/W3088506027', 'https://openalex.org/W2466887265', 'https://openalex.org/W2147092467', 'https://openalex.org/W2089963378', 'https://openalex.org/W2059112004', 'https://openalex.org/W2011001474', 'https://openalex.org/W1983539550'], 'abstract_inverted_index': {'Although': [0], 'pulse-modulated': [1, 33, 72], 'plasma': [2, 34, 56, 61, 73, 141, 145], 'has': [3], 'overcome': [4], 'various': [5, 54], 'problems': [6], 'encountered': [7], 'during': [8, 109], 'the': [9, 12, 32, 36, 64, 69, 79, 86, 99, 130], 'development': [10], 'of': [11, 25, 29, 66, 71, 132], 'high': [13], 'aspect': [14], 'ratio': [15], 'contact': [16], 'hole': [17], 'etching': [18, 49, 102, 134], 'process,': [19], 'there': [20], 'is': [21, 74, 90, 111, 119], 'still': [22], 'a': [23], 'lack': [24], 'understanding': [26], 'in': [27], 'terms': [28], 'precisely': [30], 'how': [31], 'solves': [35], 'issues.': [37], 'In': [38], 'this': [39, 122], 'research,': [40], 'to': [41, 103], 'gain': [42], 'insight': [43], 'into': [44], 'previously': [45], 'observed': [46], 'phenomena,': [47], 'SiO2': [48, 133], 'characteristics': [50], 'were': [51], 'investigated': [52], 'under': [53], 'pulsed': [55], 'conditions': [57], 'and': [58, 78, 96, 115, 135], 'analyzed': [59, 75], 'through': [60], 'diagnostics.': [62], 'Specifically,': [63], 'disappearance': [65], 'micro-trenching': [67], 'from': [68, 101], 'use': [70], 'via': [76, 92, 113], 'self-bias,': [77], 'phenomenon': [80], 'that': [81, 121], 'as': [82], 'power': [83, 108], 'off-time': [84], 'increases,': [85], 'sidewall': [87], 'angle': [88], 'increases': [89], 'interpreted': [91], 'radical': [93], 'species': [94], 'density': [95], 'self-bias.': [97], 'Further,': [98], 'change': [100], 'deposition': [104], 'with': [105], 'decreased': [106], 'peak': [107], 'processing': [110, 138, 146], 'understood': [112], 'self-bias': [114], 'electron': [116], 'density.': [117], 'It': [118], 'expected': [120], 'research': [123], 'will': [124], 'provide': [125], 'an': [126], 'informative': [127], 'window': [128], 'for': [129, 136, 143], 'optimization': [131], 'basic': [137], 'databases': [139], 'including': [140], 'diagnosis': [142], 'advanced': [144], 'simulators.': [147]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W3197419717', 'counts_by_year': [{'year': 2024, 'cited_by_count': 3}, {'year': 2023, 'cited_by_count': 11}, {'year': 2022, 'cited_by_count': 18}], 'updated_date': '2024-12-09T22:35:36.079025', 'created_date': '2021-09-13'}