Title: Direct and all-dry microfabrication of ultramicroelectrode based on cold atmospheric microplasma jet
Abstract: We develop a direct and all-dry microfabrication method of ultramicroelectrode based on cold atmospheric microplasma jet. The microfabrication process includes micropipette preparation, metal sputtering, chemical vapor deposition of parylene-C layer and microplasma jet micromachining (Fig. 1). The generated microplasma jet can effectively remove the polymer layer on the tip. The exposed metal part can be used as ultramicroelectrode point or further modified with electrochemical deposition and other methods. The exposed area can be controlled by the treatment time and the average etching rate is approximately <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1.1 \mu\mathrm{m}/\mathrm{s}$</tex> . Due to the properties of cold atmospheric microplasma jet, the microfabrication can be realized without high-precision machining and vacuum equipment.
Publication Year: 2021
Publication Date: 2021-04-25
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 1
AI Researcher Chatbot
Get quick answers to your questions about the article from our AI researcher chatbot