Title: Adhesion force measurements of compressed PVA brushes on a Flat plate
Abstract: PVA brushes are widely used for cleaning after CMP process in the semiconductor manufacturing. The PVA brushes have a high cleaning ability, but it sometimes become an origin of surface contamination owing to the attachment of the brush itself. The purpose of this study is to measure the adhesion force between PVA brushes and a flat plate. We compressed the PVA brush to flat plates with different wettability for several time and measured the adhesion force between the plate and brush during pulling up using a high response road cell. As a result, we confirmed that the combination between a PVA brush with skin layer and PMMA plate shows high adhesion force than other material plate. And we also confirmed that the adhesion force increased with increase the compression time. On the other hand, such high adhesion force could not be measured with a PVA brush without skin layer.
Publication Year: 2019
Publication Date: 2019-01-01
Language: en
Type: article
Indexed In: ['crossref']
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