Publication Information

{'id': 'https://openalex.org/W2968163056', 'doi': 'https://doi.org/10.3390/mi10080547', 'title': 'Contact Photolithography at Sub-Micrometer Scale Using a Soft Photomask', 'display_name': 'Contact Photolithography at Sub-Micrometer Scale Using a Soft Photomask', 'publication_year': 2019, 'publication_date': '2019-08-18', 'ids': {'openalex': 'https://openalex.org/W2968163056', 'doi': 'https://doi.org/10.3390/mi10080547', 'mag': '2968163056', 'pmid': 'https://pubmed.ncbi.nlm.nih.gov/31426559', 'pmcid': 'https://www.ncbi.nlm.nih.gov/pmc/articles/6723422'}, 'language': 'en', 'primary_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.3390/mi10080547', 'pdf_url': 'https://www.mdpi.com/2072-666X/10/8/547/pdf?version=1566291506', 'source': {'id': 'https://openalex.org/S96702057', 'display_name': 'Micromachines', 'issn_l': '2072-666X', 'issn': ['2072-666X'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310310987', 'host_organization_name': 'Multidisciplinary Digital Publishing Institute', 'host_organization_lineage': ['https://openalex.org/P4310310987'], 'host_organization_lineage_names': ['Multidisciplinary Digital Publishing Institute'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref', 'doaj', 'pubmed'], 'open_access': {'is_oa': True, 'oa_status': 'gold', 'oa_url': 'https://www.mdpi.com/2072-666X/10/8/547/pdf?version=1566291506', 'any_repository_has_fulltext': True}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5072763578', 'display_name': 'Chun-Ying Wu', 'orcid': 'https://orcid.org/0000-0002-9018-2914'}, 'institutions': [{'id': 'https://openalex.org/I91807558', 'display_name': 'National Cheng Kung University', 'ror': 'https://ror.org/01b8kcc49', 'country_code': 'TW', 'type': 'education', 'lineage': ['https://openalex.org/I91807558']}], 'countries': ['TW'], 'is_corresponding': False, 'raw_author_name': 'Chun-Ying Wu', 'raw_affiliation_strings': ['Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan'], 'affiliations': [{'raw_affiliation_string': 'Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan', 'institution_ids': ['https://openalex.org/I91807558']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5038265695', 'display_name': 'Heng Hsieh', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I91807558', 'display_name': 'National Cheng Kung University', 'ror': 'https://ror.org/01b8kcc49', 'country_code': 'TW', 'type': 'education', 'lineage': ['https://openalex.org/I91807558']}], 'countries': ['TW'], 'is_corresponding': False, 'raw_author_name': 'Heng Hsieh', 'raw_affiliation_strings': ['Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan'], 'affiliations': [{'raw_affiliation_string': 'Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan', 'institution_ids': ['https://openalex.org/I91807558']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5068385728', 'display_name': 'Yung-Chun Lee', 'orcid': 'https://orcid.org/0000-0001-8990-6615'}, 'institutions': [{'id': 'https://openalex.org/I91807558', 'display_name': 'National Cheng Kung University', 'ror': 'https://ror.org/01b8kcc49', 'country_code': 'TW', 'type': 'education', 'lineage': ['https://openalex.org/I91807558']}], 'countries': ['TW'], 'is_corresponding': True, 'raw_author_name': 'Yung-Chun Lee', 'raw_affiliation_strings': ['Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan'], 'affiliations': [{'raw_affiliation_string': 'Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan', 'institution_ids': ['https://openalex.org/I91807558']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 1, 'corresponding_author_ids': ['https://openalex.org/A5068385728'], 'corresponding_institution_ids': ['https://openalex.org/I91807558'], 'apc_list': {'value': 2000, 'currency': 'CHF', 'value_usd': 2165, 'provenance': 'doaj'}, 'apc_paid': {'value': 2000, 'currency': 'CHF', 'value_usd': 2165, 'provenance': 'doaj'}, 'fwci': 0.906, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 15, 'citation_normalized_percentile': {'value': 0.535793, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 89, 'max': 90}, 'biblio': {'volume': '10', 'issue': '8', 'first_page': '547', 'last_page': '547'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T12224', 'display_name': 'Nanofabrication and Lithography Techniques', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T12224', 'display_name': 'Nanofabrication and Lithography Techniques', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T11338', 'display_name': 'Advancements in Photolithography Techniques', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T12452', 'display_name': 'Electrowetting and Microfluidic Technologies', 'score': 0.9968, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/photomask', 'display_name': 'Photomask', 'score': 0.9816757}, {'id': 'https://openalex.org/keywords/photoresist', 'display_name': 'Photoresist', 'score': 0.72354436}, {'id': 'https://openalex.org/keywords/contact-print', 'display_name': 'Contact print', 'score': 0.57474303}, {'id': 'https://openalex.org/keywords/micrometer', 'display_name': 'Micrometer', 'score': 0.5340921}, {'id': 'https://openalex.org/keywords/micropatterning', 'display_name': 'Micropatterning', 'score': 0.48816139}, {'id': 'https://openalex.org/keywords/soft-lithography', 'display_name': 'Soft Lithography', 'score': 0.48075697}, {'id': 'https://openalex.org/keywords/polydimethylsiloxane', 'display_name': 'Polydimethylsiloxane', 'score': 0.47338143}, {'id': 'https://openalex.org/keywords/conformable-matrix', 'display_name': 'Conformable matrix', 'score': 0.46887827}], 'concepts': [{'id': 'https://openalex.org/C14737013', 'wikidata': 'https://www.wikidata.org/wiki/Q1319657', 'display_name': 'Photomask', 'level': 4, 'score': 0.9816757}, {'id': 'https://openalex.org/C105487726', 'wikidata': 'https://www.wikidata.org/wiki/Q622938', 'display_name': 'Photolithography', 'level': 2, 'score': 0.93590975}, {'id': 'https://openalex.org/C134406635', 'wikidata': 'https://www.wikidata.org/wiki/Q1439684', 'display_name': 'Photoresist', 'level': 3, 'score': 0.72354436}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.7133393}, {'id': 'https://openalex.org/C188079319', 'wikidata': 'https://www.wikidata.org/wiki/Q372487', 'display_name': 'Contact print', 'level': 2, 'score': 0.57474303}, {'id': 'https://openalex.org/C160671074', 'wikidata': 'https://www.wikidata.org/wiki/Q267131', 'display_name': 'Wafer', 'level': 2, 'score': 0.5541234}, {'id': 'https://openalex.org/C171635847', 'wikidata': 'https://www.wikidata.org/wiki/Q406983', 'display_name': 'Micrometer', 'level': 2, 'score': 0.5340921}, {'id': 'https://openalex.org/C136525101', 'wikidata': 'https://www.wikidata.org/wiki/Q5428139', 'display_name': 'Fabrication', 'level': 3, 'score': 0.51417947}, {'id': 'https://openalex.org/C204223013', 'wikidata': 'https://www.wikidata.org/wiki/Q133036', 'display_name': 'Lithography', 'level': 2, 'score': 0.50923026}, {'id': 'https://openalex.org/C2859760', 'wikidata': 'https://www.wikidata.org/wiki/Q6839807', 'display_name': 'Micropatterning', 'level': 2, 'score': 0.48816139}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.4827339}, {'id': 'https://openalex.org/C118524077', 'wikidata': 'https://www.wikidata.org/wiki/Q7554001', 'display_name': 'Soft lithography', 'level': 4, 'score': 0.48075697}, {'id': 'https://openalex.org/C2779849746', 'wikidata': 'https://www.wikidata.org/wiki/Q411955', 'display_name': 'Polydimethylsiloxane', 'level': 2, 'score': 0.47338143}, {'id': 'https://openalex.org/C86072612', 'wikidata': 'https://www.wikidata.org/wiki/Q5160239', 'display_name': 'Conformable matrix', 'level': 2, 'score': 0.46887827}, {'id': 'https://openalex.org/C2777289219', 'wikidata': 'https://www.wikidata.org/wiki/Q7632154', 'display_name': 'Substrate (aquarium)', 'level': 2, 'score': 0.4275879}, {'id': 'https://openalex.org/C49040817', 'wikidata': 'https://www.wikidata.org/wiki/Q193091', 'display_name': 'Optoelectronics', 'level': 1, 'score': 0.3961414}, {'id': 'https://openalex.org/C53524968', 'wikidata': 'https://www.wikidata.org/wiki/Q7315582', 'display_name': 'Resist', 'level': 3, 'score': 0.37343282}, {'id': 'https://openalex.org/C120665830', 'wikidata': 'https://www.wikidata.org/wiki/Q14620', 'display_name': 'Optics', 'level': 1, 'score': 0.30841315}, {'id': 'https://openalex.org/C2779227376', 'wikidata': 'https://www.wikidata.org/wiki/Q6505497', 'display_name': 'Layer (electronics)', 'level': 2, 'score': 0.18586752}, {'id': 'https://openalex.org/C159985019', 'wikidata': 'https://www.wikidata.org/wiki/Q181790', 'display_name': 'Composite material', 'level': 1, 'score': 0.08420384}, {'id': 'https://openalex.org/C71924100', 'wikidata': 'https://www.wikidata.org/wiki/Q11190', 'display_name': 'Medicine', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C111368507', 'wikidata': 'https://www.wikidata.org/wiki/Q43518', 'display_name': 'Oceanography', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C121332964', 'wikidata': 'https://www.wikidata.org/wiki/Q413', 'display_name': 'Physics', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C204787440', 'wikidata': 'https://www.wikidata.org/wiki/Q188504', 'display_name': 'Alternative medicine', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C142724271', 'wikidata': 'https://www.wikidata.org/wiki/Q7208', 'display_name': 'Pathology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C127313418', 'wikidata': 'https://www.wikidata.org/wiki/Q1069', 'display_name': 'Geology', 'level': 0, 'score': 0.0}], 'mesh': [], 'locations_count': 5, 'locations': [{'is_oa': True, 'landing_page_url': 'https://doi.org/10.3390/mi10080547', 'pdf_url': 'https://www.mdpi.com/2072-666X/10/8/547/pdf?version=1566291506', 'source': {'id': 'https://openalex.org/S96702057', 'display_name': 'Micromachines', 'issn_l': '2072-666X', 'issn': ['2072-666X'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310310987', 'host_organization_name': 'Multidisciplinary Digital Publishing Institute', 'host_organization_lineage': ['https://openalex.org/P4310310987'], 'host_organization_lineage_names': ['Multidisciplinary Digital Publishing Institute'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, {'is_oa': False, 'landing_page_url': 'https://doaj.org/article/8a980438ec9d4e4784dd6a1eba37cb5e', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S4306401280', 'display_name': 'DOAJ (DOAJ: Directory of Open Access Journals)', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'repository'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, {'is_oa': True, 'landing_page_url': 'https://europepmc.org/articles/pmc6723422', 'pdf_url': 'https://europepmc.org/articles/pmc6723422?pdf=render', 'source': {'id': 'https://openalex.org/S4306400806', 'display_name': 'Europe PMC (PubMed Central)', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I1303153112', 'host_organization_name': 'European Bioinformatics Institute', 'host_organization_lineage': ['https://openalex.org/I1303153112'], 'host_organization_lineage_names': ['European Bioinformatics Institute'], 'type': 'repository'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, {'is_oa': True, 'landing_page_url': 'https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723422', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S2764455111', 'display_name': 'PubMed Central', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I1299303238', 'host_organization_name': 'National Institutes of Health', 'host_organization_lineage': ['https://openalex.org/I1299303238'], 'host_organization_lineage_names': ['National Institutes of Health'], 'type': 'repository'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, {'is_oa': False, 'landing_page_url': 'https://pubmed.ncbi.nlm.nih.gov/31426559', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S4306525036', 'display_name': 'PubMed', 'issn_l': None, 'issn': None, 'is_oa': False, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I1299303238', 'host_organization_name': 'National Institutes of Health', 'host_organization_lineage': ['https://openalex.org/I1299303238'], 'host_organization_lineage_names': ['National Institutes of Health'], 'type': 'repository'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.3390/mi10080547', 'pdf_url': 'https://www.mdpi.com/2072-666X/10/8/547/pdf?version=1566291506', 'source': {'id': 'https://openalex.org/S96702057', 'display_name': 'Micromachines', 'issn_l': '2072-666X', 'issn': ['2072-666X'], 'is_oa': True, 'is_in_doaj': True, 'is_core': True, 'host_organization': 'https://openalex.org/P4310310987', 'host_organization_name': 'Multidisciplinary Digital Publishing Institute', 'host_organization_lineage': ['https://openalex.org/P4310310987'], 'host_organization_lineage_names': ['Multidisciplinary Digital Publishing Institute'], 'type': 'journal'}, 'license': 'cc-by', 'license_id': 'https://openalex.org/licenses/cc-by', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'sustainable_development_goals': [], 'grants': [{'funder': 'https://openalex.org/F4320322795', 'funder_display_name': 'Ministry of Science and Technology, Taiwan', 'award_id': 'MOST 104-2622-E-006-012-CC2'}, {'funder': 'https://openalex.org/F4320322795', 'funder_display_name': 'Ministry of Science and Technology, Taiwan', 'award_id': 'MOST 104-3113-E-006-002'}, {'funder': 'https://openalex.org/F4320322795', 'funder_display_name': 'Ministry of Science and Technology, Taiwan', 'award_id': 'NSC 101-2221-E-006-037-MY3'}], 'datasets': [], 'versions': [], 'referenced_works_count': 19, 'referenced_works': ['https://openalex.org/W105846184', 'https://openalex.org/W1501261314', 'https://openalex.org/W1976423345', 'https://openalex.org/W1988960233', 'https://openalex.org/W2018838191', 'https://openalex.org/W2020416116', 'https://openalex.org/W2024067344', 'https://openalex.org/W2025326903', 'https://openalex.org/W2036259874', 'https://openalex.org/W2053004872', 'https://openalex.org/W2062182733', 'https://openalex.org/W2075587758', 'https://openalex.org/W2081875458', 'https://openalex.org/W2093464257', 'https://openalex.org/W2100059871', 'https://openalex.org/W2121042530', 'https://openalex.org/W2166213615', 'https://openalex.org/W2168966364', 'https://openalex.org/W2171677346'], 'related_works': ['https://openalex.org/W4297671302', 'https://openalex.org/W4239409485', 'https://openalex.org/W3130777906', 'https://openalex.org/W3127029249', 'https://openalex.org/W2980950170', 'https://openalex.org/W2509017871', 'https://openalex.org/W2400360472', 'https://openalex.org/W2100513105', 'https://openalex.org/W2043602757', 'https://openalex.org/W2006945507'], 'abstract_inverted_index': {'This': [0, 54], 'paper': [1], 'proposes': [2], 'a': [3, 26, 36, 43, 67, 110], 'method': [4], 'for': [5], 'improving': [6], 'the': [7, 15, 19, 93, 103], 'patterning': [8, 98], 'resolution': [9], 'of': [10, 83, 106, 121, 125], 'conventional': [11], 'contact': [12, 65, 74, 100, 126], 'photolithography': [13, 75, 101, 127], 'from': [14, 35], 'micrometer,': [16], 'down': [17], 'to': [18, 48], 'sub-micrometer': [20], 'scale.': [21], 'The': [22, 80, 117], 'key': [23], 'element': [24], 'is': [25, 32], 'soft': [27, 55, 86, 95], 'polydimethylsiloxane': [28], '(PDMS)': [29], 'photomask,': [30, 96], 'which': [31], 'first': [33], 'replicated': [34], 'silicon': [37], 'mold': [38], 'and': [39, 63, 70, 119], 'then': [40], 'patterned': [41], 'with': [42, 66, 76, 102], 'black': [44], 'photoresist': [45], '(PR)': [46], 'layer': [47], 'selectively': [49], 'block': [50], 'ultraviolet': [51], '(UV)': [52], 'light.': [53], 'PDMS': [56], 'photomask': [57, 87], 'can': [58, 72], 'easily': [59], 'form': [60], 'an': [61], 'intimate': [62], 'conformable': [64], 'PR-coated': [68], 'substrate': [69], 'hence': [71], 'perform': [73], 'high': [77], 'pattern': [78], 'resolution.': [79], 'fabrication': [81], 'processes': [82], 'this': [84, 122], 'black-PR/PDMS': [85], 'are': [88], 'experimentally': [89], 'carried': [90], 'out.': [91], 'Using': [92], 'fabricated': [94], 'UV': [97], 'by': [99], 'smallest': [104], 'line-width': [105], '170': [107], 'nm': [108], 'over': [109], '4”': [111], 'wafer': [112], 'area': [113], 'was': [114], 'successfully': [115], 'achieved.': [116], 'advantages': [118], 'potentials': [120], 'new': [123], 'type': [124], 'will': [128], 'be': [129], 'addressed.': [130]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2968163056', 'counts_by_year': [{'year': 2024, 'cited_by_count': 1}, {'year': 2023, 'cited_by_count': 4}, {'year': 2022, 'cited_by_count': 5}, {'year': 2021, 'cited_by_count': 5}], 'updated_date': '2025-01-17T01:45:43.114578', 'created_date': '2019-08-22'}