Title: Effects of Deposition Time on the Structure and Properties of AZO Thin Films Deposited on Quartz Glass by Magnetron Sputtering
Abstract: The AZO films deposited on quartz glass by magnetron sputtering with different deposition time various from 30min to 120min.All of the obtained samples had a (002) diffraction peak range from 34.31 to 34.52°, while the mean grain size increased from 30.1nm (30min) to 56.1nm (120min) respectively. The XPS survey indicated the photoelectron peaks of Zn ,O and C elements occured. The optimal transmittance of the films reduced obviously from about 92% to 78% near 550nm with deposition time increased from 30min to 120min. And the average transmittance of AZO films prepared at 30, 60 and 90min was about 85% in the visible light region.
Publication Year: 2019
Publication Date: 2019-06-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 1
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