Title: Waveguide integration silicon MSM photodetector in silicon nitride-on-SOI platform for visible and NIR wavelength band
Abstract: We propose and demonstrate a Silicon MSM photodetector integrated on Silicon Nitride-on-SOI platform. The demonstration shows the feasibility of an integrated photonic circuit platform in the visible to NIR wavelength with an integrated Silicon photodetector. We present a planarization free oxidation based Silicon Nitride waveguide fabrication on SOI. DC measurements on photo-detectors with the top illumination of 850 nm light observe the best responsivity of 0.1 A/W at 20 V with a dark current of 570 nA.
Publication Year: 2018
Publication Date: 2018-02-22
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 2
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