Title: OS1-04 Gas heating system for microchannels
Abstract:Heating of fluid in microchannels is an important process in many micro fluidic devices (microreactors, microsensors and microthrusters). A microchannel with heater grooves was fabricated using DRIE m...Heating of fluid in microchannels is an important process in many micro fluidic devices (microreactors, microsensors and microthrusters). A microchannel with heater grooves was fabricated using DRIE method. A nickel wire is fixed in the groove which was formed perpendicularly to the microchannel. After the microchannel and the wire were assembled. FeCl_3 solution was pumped through the channel in order to etch the wire. The exposed part of nickel wire was etched locally in the microchannel. The fabrication is simple but this heater is expected to work effectively for microchannel fluid.Read More