Title: The Microwave Equivalent Circuits of Tuned MEMS Shunt-Capacitive Switches
Abstract: This paper proposes the microwave equivalent circuit models of the tuned MEMS shunt-capacitive switches and presents their down-state resonance choice formulation and upstate impedance matching formulation. The design method of this kind of MEMS switches is developed based on the analysis of microwave equivalent circuits. The circuit simulation results of the MEMS switch for X band based on those equivalent models are described and compared with the results of HFSS software. The good agreement verifies the effectiveness of those formulations. Those simplified models help to design high-performance RF MEMS switches in an easier way.
Publication Year: 2006
Publication Date: 2006-03-22
Language: en
Type: article
Indexed In: ['crossref']
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