Title: RF MEMS resonators: Material properties extraction
Abstract: Analytical formula for the resonance frequencies of circular, square, and hexagonal MEMS resonators are extracted based on the analytical model for extensional vibrations of MEMS resonators. Material properties for the MEMS resonators are then extracted based on the analytical formula. Experimental measurement is done to extract the material properties of single crystal silicon MEMS resonators to verify the extraction method.
Publication Year: 2009
Publication Date: 2009-11-01
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
AI Researcher Chatbot
Get quick answers to your questions about the article from our AI researcher chatbot