Publication Information

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[], 'related_works': [], 'abstract_inverted_index': {'Al과': [0, 113], 'Si사이에서': [1, 114], 'Ti의': [2], '충진처리가': [3, 112], '확산방지막': [4], '성능에': [5], '미치는': [6], '영향에': [7], '대해서': [8], '조사하였다.': [9], 'TiN의': [10, 23, 43, 98, 111, 129], '충진처리는': [11], '450˚C의': [12], 'N2': [13], '분위기에서': [14], '30분간': [15], '열처리함으로써': [16], '행하였다.': [17], 'TEM': [18], '분석을': [19], '통해': [20], '갓': [21, 58, 74, 82], '증착된': [22, 59, 75, 83], '결정립': [24], '사이에는': [25], '약': [26, 69], '10-20A': [27], '정도의': [28, 63], '고체물질이': [29], '없거나': [30], 'TiN에': [31], '비해': [32], '밀도가': [33], '매우': [34], '낮은': [35], '공간이': [36], '존재함을': [37], '알': [38, 51, 122], '수': [39, 52, 123], '있었다.': [40, 53, 73, 124], '또한': [41], '충진처리된': [42, 67, 77, 97], '경우에는': [44, 99], '이러한': [45], '공간의': [46], '폭이': [47], '10A': [48], '이하로': [49], '줄어듦을': [50], 'RBS와': [54], 'AES': [55], '분석에': [56], '의해': [57], 'TiN는': [60, 68, 84], 'dir': [61], '7at.%': [62], '산소를': [64, 71], '함유하고': [65, 72], '있었고,': [66], '10-15at.%의': [70], 'TiN와': [76], 'TiN를': [78], '확산방지막으로': [79], '시험한': [80], '결과,': [81], '650˚C,': [85], '1시간의': [86], '열처리': [87, 101], '후에': [88], 'Al': [89, 103], '스파이크와': [90], 'Si': [91, 105], '패임자국의': [92], '형성으로': [93], '이해': [94], '파괴되었다.': [95], '하지만': [96], '같은': [100, 126], '조건에서': [102], '스파이크나': [104], '패임자국을': [106], '전혀': [107], '찾아볼수': [108], '없었다.': [109], '따라서,': [110], '확산': [115, 135], '방지막': [116], '성능을': [117], '크게': [118], '향상시켜주는': [119], '효과가': [120], '있음을': [121], '이와': [125], '충진처리': [127], '효과는': [128], '결정립계의': [130], '간격이': [131], '줄어듦에': [132], '의해서': [133], '빠른': [134], '경로인': [136], '결정립계를': [137], '통한': [138], '확산이': [139], '감소하는': [140], '것에': [141], '기인하는': [142], '것으로': [143], '이해된다.': [144]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2492470561', 'counts_by_year': [], 'updated_date': '2024-12-14T19:25:28.225067', 'created_date': '2016-08-23'}